Invention Grant
- Patent Title: Process kit shield for improved particle reduction
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Application No.: US15830924Application Date: 2017-12-04
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Publication No.: US10718049B2Publication Date: 2020-07-21
- Inventor: Muhammad Rasheed , Rongjun Wang , Zhendong Liu , Xinyu Fu , Xianmin Tang
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C14/35
- IPC: C23C14/35 ; C23C14/56 ; H01J37/32 ; H01J37/34

Abstract:
Apparatus for improved particle reduction are provided herein. In some embodiments, an apparatus may include a process kit shield comprising a one-piece metal body having an upper portion and a lower portion and having an opening disposed through the one-piece metal body, wherein the upper portion includes an opening-facing surface configured to be disposed about and spaced apart from a target of a physical vapor deposition chamber and wherein the opening-facing surface is configured to limit particle deposition on an upper surface of the upper portion of the one-piece metal body during sputtering of a target material from the target of the physical vapor deposition chamber.
Public/Granted literature
- US20180087147A1 PROCESS KIT SHIELD FOR IMPROVED PARTICLE REDUCTION Public/Granted day:2018-03-29
Information query
IPC分类: