Invention Grant
- Patent Title: Measuring device and measuring method
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Application No.: US16325662Application Date: 2016-08-31
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Publication No.: US10707047B2Publication Date: 2020-07-07
- Inventor: Noritsugu Takahashi , Makoto Sakakibara , Wataru Mori , Hajime Kawano , Yuko Sasaki
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Volpe and Koenig, P.C.
- International Application: PCT/JP2016/075413 WO 20160831
- International Announcement: WO2018/042531 WO 20180308
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/12 ; H01J37/21 ; H01J37/244 ; H01J37/10 ; H01J37/141

Abstract:
A measuring device for measuring a sample by emitting a charged particle beam includes a particle source, an electronic lens, a detector, a stage, a sensor for measuring the environment, and a control device, in which the control device includes a control module having a height calculation module configured to calculate a height estimation value indicating an estimated height of the sample at a measurement position; and a correction value calculation module configured to calculate a correction value reflecting a change of the environment based on the measurement position of the sample and an amount of change of the environment measured by the sensor, and the control module corrects the height estimation value based on the correction value, and sets a control value for controlling focus adjustment using the electronic lens based on the corrected height estimation value.
Public/Granted literature
- US20190206654A1 MEASURING DEVICE AND MEASURING METHOD Public/Granted day:2019-07-04
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