Invention Grant
- Patent Title: Double-membrane MEMS component and production method for a double-membrane MEMS component
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Application No.: US16118055Application Date: 2018-08-30
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Publication No.: US10669151B2Publication Date: 2020-06-02
- Inventor: Johann Strasser , Alfons Dehe , Gerhard Metzger-Brueckl , Juergen Wagner , Arnaud Walther
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7748f527
- Main IPC: B81B7/02
- IPC: B81B7/02 ; B81C1/00 ; H04R19/04 ; H04R31/00 ; H04R19/00 ; B81B3/00

Abstract:
A production method for a double-membrane MEMS component includes: providing a layer arrangement on a carrier substrate, wherein the layer arrangement comprises a first membrane structure, a sacrificial material layer adjoining the first membrane structure, and a counterelectrode structure in the sacrificial material layer and at a distance from the first membrane structure, wherein at least one through opening is formed in the sacrificial material layer as far as the first membrane structure; forming a filling material structure in the at least one through opening by applying a first filling material layer on the wall region of the at least one through opening; applying a second membrane structure on the layer arrangement with the sacrificial material; and removing the sacrificial material from an intermediate region to expose the filling material structure in the intermediate region.
Public/Granted literature
- US20190071305A1 DOUBLE-MEMBRANE MEMS COMPONENT AND PRODUCTION METHOD FOR A DOUBLE-MEMBRANE MEMS COMPONENT Public/Granted day:2019-03-07
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