- 专利标题: Ferro-electric complementary FET
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申请号: US16576441申请日: 2019-09-19
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公开(公告)号: US10658384B2公开(公告)日: 2020-05-19
- 发明人: David J. Frank , Paul M. Solomon , Xiao Sun
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: F. Chau & Associates, LLC
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L27/1159 ; H01L29/78 ; H01L29/45 ; H01L27/092
摘要:
A field-effect transistor includes a semiconductor substrate having first, second, third, and fourth sides, and a ferroelectric gate stack on an upper surface of the substrate. The ferroelectric gate stack includes a gate insulating layer; and a ferroelectric material layer on the gate insulating layer. Portions of the upper surface of the substrate between the first side and the ferroelectric gate stack and between the second side and the ferroelectric gate stack are doped with n-type impurities, and portions of the upper surface of the substrate between the third side and the ferroelectric gate stack and between the fourth side and the ferroelectric gate stack are doped with p-type impurities. A presence of both n and p channels in a same region increases a capacitance and voltage gain of the ferroelectric gate stack.
公开/授权文献
- US20200013785A1 FERRO-ELECTRIC COMPLEMENTARY FET 公开/授权日:2020-01-09
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