- 专利标题: Fiber-containing resin substrate, encapsulated semiconductor devices mounting substrate, encapsulated semiconductor devices forming wafer, encapsulated semiconductor devices mounting sheet, semiconductor equipment, and method for manufacturing semiconductor equipment
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申请号: US16040850申请日: 2018-07-20
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公开(公告)号: US10600707B2公开(公告)日: 2020-03-24
- 发明人: Yoshihiro Tsutsumi , Shuichi Fujii , Kenji Hagiwara , Shinsuke Yamaguchi
- 申请人: SHIN-ETSU CHEMICAL CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP2017-163784 20170828
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L21/56 ; H01L21/78 ; H01L23/29 ; B29C70/68 ; C08L63/00 ; C08G59/62 ; C08G59/40 ; C08G59/24 ; B29L31/34 ; B29C70/70 ; B29K63/00 ; B29C70/08
摘要:
A fiber-containing resin substrate includes a thermosetting epoxy resin-impregnated fiber base material, and an uncured resin layer formed on one side thereof formed from a composition containing: (A) a crystalline bisphenol A type epoxy resin and/or a crystalline bisphenol F type epoxy resin, (B) an epoxy resin that is non-fluid at 25° C. other than the component (A), (C) a phenol compound having two or more phenolic hydroxy groups in one molecule, (D) an inorganic filler, and (E) an urea-based curing accelerator. The fiber-containing resin substrate collectively encapsulates a semiconductor devices mounting surface or a semiconductor devices forming surface on a wafer level, even when a large-diameter wafer or a large-diameter substrate is encapsulated, to reduce warpage of the substrate or the wafer and peeling of a semiconductor device from the substrate, and to have the uncured resin layer excellent in storage stability and handleability before curing.
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