- 专利标题: Method for manufacturing pattern-formed body
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申请号: US14897478申请日: 2014-06-06
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公开(公告)号: US10545404B2公开(公告)日: 2020-01-28
- 发明人: Makiya Ito , Ryosuke Endo , KyungSung Yun , Hirofumi Kondo
- 申请人: DEXERIALS CORPORATION
- 申请人地址: JP Shinagawa-Ku, Tokyo
- 专利权人: DEXERIALS CORPORATION
- 当前专利权人: DEXERIALS CORPORATION
- 当前专利权人地址: JP Shinagawa-Ku, Tokyo
- 代理机构: Buchanan, Ingersoll & Rooney PC
- 优先权: JP2013-122812 20130611
- 国际申请: PCT/JP2014/065065 WO 20140606
- 国际公布: WO2014/199910 WO 20141218
- 主分类号: G03F7/038
- IPC分类号: G03F7/038
摘要:
To provide a production method of a pattern-formed body, which can simply provide a pattern with surface free energy differences. A cured resin layer, to which a pattern of a master (20) has been transferred, is formed on a base (11), by applying a resin composition (12) containing a first compound exhibiting low surface free energy, and a second compound exhibiting surface free energy higher than the surface free energy of the first compound, on the base (11), and curing the resin composition (12) with bringing the resin composition into contact with a master (20), to which a pattern has been formed with surface free energy differences.
公开/授权文献
- US20160124305A1 METHOD FOR MANUFACTURING PATTERN-FORMED BODY 公开/授权日:2016-05-05
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