Microelectromechanical systems-based logic gates
摘要:
Disclosed is a microelectromechanical systems (MEMS) logic gate with a first logic MEMS switch having a first beam with a first switch contact, a first gate, and a first terminal contact, wherein the first beam is coupled to a fixed higher voltage node. The MEMS logic gate also includes a second logic MEMS switch having a second beam with a second switch contact, a second gate, and a second terminal contact, wherein the second beam is electrically coupled to a fixed lower voltage node. Further included is internal logic gate circuitry having a first input terminal and a first output terminal, wherein the internal logic gate circuitry is electrically coupled between the first terminal contact of the first logic MEMS switch and the second terminal contact of the second logic MEMS switch.
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