- 专利标题: GaN lateral vertical JFET with regrown channel and dielectric gate
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申请号: US15882040申请日: 2018-01-29
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公开(公告)号: US10535741B2公开(公告)日: 2020-01-14
- 发明人: Gangfeng Ye
- 申请人: Hua Su Dian Li (Su Zhou) Co. Ltd.
- 申请人地址: US CA Fremont
- 专利权人: Gangfeng Ye
- 当前专利权人: Gangfeng Ye
- 当前专利权人地址: US CA Fremont
- 代理机构: Imperium Patent Works
- 代理商 Helen Mao
- 主分类号: H01L29/20
- IPC分类号: H01L29/20 ; H01L29/66 ; H01L29/10 ; H01L29/78 ; H01L29/808
摘要:
A vertical JFET is provided. The JFET is mixed with lateral channel structure and p-GaN gate structure. The JFET has a N+ implant source region. In one embodiment, a JFET is provided with a drain metal deposited over a backside of an N substrate, an n-type drift layer epitaxial grown over a topside of the N substrate, a buried P-type block layer deposited over the n-type drift layer, an implanted N+ source region on side walls of the lateral channel layer, and an source metal attached to the top of the p-layer and attached to the implanted N+ source region at the side. In one embodiment, the JFET further comprises a gate layer, and wherein the gate layer is a dielectric gate structure that enables a fully enhanced channel. In another embodiment, the gate layer is a p-type GaN gate structure that enables a partially enhanced channel.
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