发明授权
- 专利标题: Field-effect transistor, method of manufacturing the same, and radio-frequency device
-
申请号: US16050815申请日: 2018-07-31
-
公开(公告)号: US10535607B2公开(公告)日: 2020-01-14
- 发明人: Naoki Saka , Daisaku Okamoto , Hideki Tanaka
- 申请人: Sony Corporation
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Michael Best & Friedrich LLP
- 优先权: JP2014-086805 20140418
- 主分类号: H01L23/535
- IPC分类号: H01L23/535 ; H01L23/482 ; H01L23/522 ; H01L23/532 ; H01L23/528 ; H01L29/06 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/78
摘要:
There is provided a field-effect transistor including: a gate electrode; a semiconductor layer having a source region and a drain region with the gate electrode in between; contact plugs provided on the source region and the drain region; first metals stacked on the contact plugs; and a low-dielectric constant region provided in a region between the first metals along an in-plane direction of the semiconductor layer and provided at least in a first region below bottom surfaces of the first metals along a stacking direction.
公开/授权文献
信息查询
IPC分类: