- 专利标题: Electrically controllable integrated switch
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申请号: US14985083申请日: 2015-12-30
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公开(公告)号: US10510503B2公开(公告)日: 2019-12-17
- 发明人: Christian Rivero , Pascal Fornara , Antonio di-Giacomo , Brice Arrazat
- 申请人: STMicroelectronics (Rousset) SAS
- 申请人地址: FR Rousset
- 专利权人: STMICROELECTRONICS (ROUSSET) SAS
- 当前专利权人: STMICROELECTRONICS (ROUSSET) SAS
- 当前专利权人地址: FR Rousset
- 代理机构: Slater Matsil, LLP
- 优先权: FR1355221 20130606
- 主分类号: H01H59/00
- IPC分类号: H01H59/00 ; H01L27/06 ; H01L21/822 ; H01H1/00 ; B81C1/00 ; H01H57/00 ; H01L23/522
摘要:
Methods of forming and operating a switching device are provided. The switching device is formed in an interconnect, the interconnect including a plurality of metallization levels, and has an assembly that includes a beam held by a structure. The beam and structure are located within the same metallization level. Locations of fixing of the structure on the beam are arranged so as to define for the beam a pivot point situated between these fixing locations. The structure is substantially symmetric with respect to the beam and to a plane perpendicular to the beam in the absence of a potential difference. The beam is able to pivot in a first direction in the presence of a first potential difference applied between a first part of the structure and to pivot in a second direction in the presence of a second potential difference applied between a second part of the structure.
公开/授权文献
- US20160107886A1 Electrically Controllable Integrated Switch 公开/授权日:2016-04-21
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