- 专利标题: Method of producing an integrated power transistor circuit having a current-measuring cell
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申请号: US15458459申请日: 2017-03-14
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公开(公告)号: US10475919B2公开(公告)日: 2019-11-12
- 发明人: Britta Wutte
- 申请人: Infineon Technologies Austria AG
- 申请人地址: AT Villach
- 专利权人: Infineon Technologies Austria AG
- 当前专利权人: Infineon Technologies Austria AG
- 当前专利权人地址: AT Villach
- 代理机构: Murphy, Bilak & Homiller, PLLC
- 优先权: DE102012102533 20120323
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L29/40 ; H01L29/66 ; H01L29/78 ; H01L29/417
摘要:
A method for producing an integrated power transistor circuit includes forming at least one transistor cell in a cell array, each transistor cell having a doped region formed in a semiconductor substrate and adjoining a first surface of the semiconductor substrate on a first side of the semiconductor substrate, depositing a contact layer on the first side, structuring the contact layer to form a contact structure from the contact layer, the contact structure having, in a projection of the cell array orthogonal to the first surface, a first section and, outside the cell array, a second section which connects the first section to an interface structure, and forming an electrode structure on and in direct contact with the first section in the orthogonal projection of the cell array, the electrode structure being absent outside the cell array.
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