发明授权
- 专利标题: Semiconductor device using EMC wafer support system and fabricating method thereof
-
申请号: US15490091申请日: 2017-04-18
-
公开(公告)号: US10388643B2公开(公告)日: 2019-08-20
- 发明人: Jin Young Kim , Doo Hyun Park , Ju Hoon Yoon , Seong Min Seo , Glenn Rinne , Choon Heung Lee
- 申请人: Amkor Technology, Inc.
- 申请人地址: US AZ Tempe
- 专利权人: Amkor Technology, Inc.
- 当前专利权人: Amkor Technology, Inc.
- 当前专利权人地址: US AZ Tempe
- 代理机构: McAndrews, Held & Malloy, Ltd.
- 优先权: KR10-2012-0131976 20121120
- 主分类号: H01L25/00
- IPC分类号: H01L25/00 ; H01L25/065 ; H01L23/31 ; H01L21/56
摘要:
Provided are a semiconductor device using, for example, an epoxy molding compound (EMC) wafer support system and a fabricating method thereof, which can, for example, adjust a thickness of the overall package in a final stage of completing the device while shortening a fabricating process and considerably reducing the fabrication cost. An example semiconductor device may comprise a first semiconductor die that comprises a bond pad and a through silicon via (TSV) connected to the bond pad; an interposer comprising a redistribution layer connected to the bond pad or the TSV and formed on the first semiconductor die, a second semiconductor die connected to the redistribution layer of the interposer and positioned on the interposer; an encapsulation unit encapsulating the second semiconductor die, and a solder ball connected to the bond pad or the TSV of the first semiconductor die.
公开/授权文献
信息查询
IPC分类: