- 专利标题: Semiconductor device and method of forming electromagnetic (EM) shielding for LC circuits
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申请号: US15664734申请日: 2017-07-31
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公开(公告)号: US10388612B2公开(公告)日: 2019-08-20
- 发明人: Yaojian Lin , Byung Joon Han , Rajendra D. Pendse , Il Kwon Shim , Pandi C. Marimuthu , Won Kyoung Choi , Linda Pei Ee Chua
- 申请人: STATS ChipPAC Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Brian M. Kaufman; Robert D. Atkins
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/498 ; H01L23/538 ; H01L23/552 ; H01L21/56 ; H01L21/683
摘要:
A semiconductor device has a first component. A modular interconnect structure is disposed adjacent to the first component. A first interconnect structure is formed over the first component and modular interconnect structure. A shielding layer is formed over the first component, modular interconnect structure, and first interconnect structure. The shielding layer provides protection for the enclosed semiconductor devices against EMI, RFI, or other inter-device interference, whether generated internally or from external semiconductor devices. The shielding layer is electrically connected to an external low-impedance ground point. A second component is disposed adjacent to the first component. The second component includes a passive device. An LC circuit includes the first component and second component. A semiconductor die is disposed adjacent to the first component. A conductive adhesive is disposed over the modular interconnect structure. The modular interconnect structure includes a height less than a height of the first component.
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