- 专利标题: Mirror, in particular for a microlithographic projection exposure apparatus
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申请号: US15871926申请日: 2018-01-15
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公开(公告)号: US10331048B2公开(公告)日: 2019-06-25
- 发明人: Oliver Dier , Kerstin Hild , Hartmut Enkisch , Matus Kalisky
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT GMBH
- 当前专利权人: CARL ZEISS SMT GMBH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Edell, Shapiro & Finnan, LLC
- 优先权: DE102015213253 20150715
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03F7/20 ; G21K1/06
摘要:
A mirror, in particular for a microlithographic projection exposure apparatus, has an optically effective surface, a mirror substrate (205, 305), a reflection layer (220, 320), which is configured to provide the mirror with a reflectivity of at least 50% for electromagnetic radiation with a predetermined operating wavelength incident on the optically effective surface (200a, 300a) at angles of incidence in relation to the respective surface normals of at least 65°, and a substrate protection layer (210, 310) which is arranged between the mirror substrate (205, 305) and the reflection layer (220, 320). The substrate protection layer has a transmission of less than 0.1% for EUV radiation.
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