Invention Grant
- Patent Title: Semiconductor device including memory and logic circuit having FETs with ferroelectric layer and manufacturing methods thereof
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Application No.: US15640127Application Date: 2017-06-30
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Publication No.: US10249756B2Publication Date: 2019-04-02
- Inventor: Kuo-Chi Tu , Jen-Sheng Yang , Sheng-Hung Shih , Tong-Chern Ong , Wen-Ting Chu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; G11C11/22 ; H01L27/1159 ; H01L27/11592 ; H01L29/51 ; H01L29/66

Abstract:
A semiconductor device includes a memory circuit and a logic circuit. The memory circuit includes a word line, a bit line, a common line and a memory transistor having a gate coupled to the word line, a drain coupled to the bit line and a source coupled to the common line. The logic circuit includes a field effect transistor (FET) having a gate, a drain and a source. The memory transistor has a gate electrode layer formed on a gate dielectric layer, and the gate dielectric layer includes a first insulating layer and a first ferroelectric (FE) material layer. The FET has a gate electrode layer formed on a gate dielectric layer, and the gate dielectric layer includes a second insulating layer and a second FE material layer.
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Information query
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