Invention Grant
- Patent Title: Method for manufacturing microcantilever
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Application No.: US15033069Application Date: 2013-11-19
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Publication No.: US10202276B2Publication Date: 2019-02-12
- Inventor: Jung Chul Lee , Il Lee
- Applicant: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY
- Applicant Address: KR Seoul
- Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY
- Current Assignee: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY
- Current Assignee Address: KR Seoul
- Agency: Kunzler, PC
- Priority: KR10-2013-0129551 20131029
- International Application: PCT/KR2013/010515 WO 20131119
- International Announcement: WO2015/064816 WO 20150507
- Main IPC: G01Q70/16
- IPC: G01Q70/16 ; B81C1/00 ; B81B3/00 ; B81C99/00 ; G01D11/30 ; G01Q70/14 ; B33Y10/00 ; B33Y30/00 ; B33Y80/00 ; B29C35/08 ; B29K71/00 ; B29K105/00 ; B29L31/00 ; B29C64/135

Abstract:
Disclosed is a method for manufacturing a microcantilever having a predetermined thickness that includes forming a liquid synthetic resin for cantilevers to a thickness corresponding to the thickness of the microcantilever on an upper surface of a base block having an adhesive base and a non-adhesive base, and curing the liquid synthetic resin for cantilevers via a boundary between the adhesive base and the non-adhesive base, wherein the adhesive base has stronger adhesivity to the cured synthetic resin for cantilevers than the non-adhesive base.
Public/Granted literature
- US20160236929A1 METHOD FOR MANUFACTURING MICROCANTILEVER Public/Granted day:2016-08-18
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