Invention Grant
- Patent Title: Magnetic core
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Application No.: US15605540Application Date: 2017-05-25
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Publication No.: US10199573B2Publication Date: 2019-02-05
- Inventor: Mona Eissa , Dok Won Lee , Byron Shulver , Yousong Zhang
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L27/22 ; H01L43/02 ; H01L43/10 ; G01R33/04 ; G01R33/00 ; H01F10/26 ; H01F41/04 ; H01F41/20

Abstract:
A method of fabricating a semiconductor device includes aligning an alignment structure of a wafer to a direction of a magnetic field created by an external electromagnet and depositing a magnetic layer (e.g., NiFe) over the wafer in the presence of the magnetic field and while applying the magnetic field and maintaining a temperature of the wafer below 150° C. An insulation layer (e.g., AlN) is deposited on the first magnetic layer. The alignment structure of the wafer is again aligned to the direction of the magnetic field and a second magnetic layer is deposited on the insulation layer, in the presence of the magnetic field and while maintaining the temperature of the wafer below 150° C.
Public/Granted literature
- US20170346000A1 MAGNETIC CORE Public/Granted day:2017-11-30
Information query
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