- 专利标题: Method of growing a nanotube including passing a carbon-based gas through first and second openings of a tube
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申请号: US15072386申请日: 2016-03-17
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公开(公告)号: US10131989B2公开(公告)日: 2018-11-20
- 发明人: Ignacio Maria Perez de Leon
- 申请人: The United States of America, as represented by the Secretary of the Navy
- 代理商 Michael Badagliacca
- 主分类号: C23C16/26
- IPC分类号: C23C16/26 ; B01J27/00 ; C23C16/04 ; C01B32/162 ; B01J23/70 ; B01J37/02
摘要:
A method includes providing a substrate including a tube with a first opening a second opening, depositing a metal film onto a portion of the tube near the first opening, and growing a carbon nanotube by passing a carbon-based gas through the tube and metal film. The gas enters the tube through the second opening and exits the tube through the first opening.
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