Invention Grant
- Patent Title: Micromechanical structure comprising carbon material and method for fabricating the same
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Application No.: US14724224Application Date: 2015-05-28
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Publication No.: US10106398B2Publication Date: 2018-10-23
- Inventor: Ulrich Schmid , Tobias Frischmuth , Peter Irsigler , Thomas Grille , Daniel Maurer , Ursula Hedenig , Markus Kahn , Guenter Denifl , Michael Schneider
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00
Abstract:
A micromechanical structure comprises a substrate and a functional structure arranged at the substrate. The functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure comprises a carbon layer arrangement, wherein a basis material of the carbon layer arrangement is a carbon material.
Public/Granted literature
- US20160353210A1 Micromechanical Structure and Method for Fabricating the Same Public/Granted day:2016-12-01
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