A light emitting device of the invention includes a substrate, an electrode connection layer, and at least one epitaxial structure. The substrate has an upper surface and a plurality of electrode pads disposed on the upper surface. The electrode connection layer is disposed on the upper surface of the substrate and electrically connected to the plurality of electrode pads. The electrode connection layer has at least one first electrode, at least one second electrode and at least one connection layer disposed between the substrate and the at least one first electrode and disposed between the substrate and the at least one second electrode. The at least one connection layer has at least one buffer region exposed on the upper surface of the substrate and being an empty gap. The at least one epitaxial structure is disposed on and electrically connected to the electrode connection layer.