- 专利标题: Semiconductor structure with uniform gate heights
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申请号: US15613981申请日: 2017-06-05
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公开(公告)号: US10083873B1公开(公告)日: 2018-09-25
- 发明人: Xing Zhang , Xinyuan Dou , Hong Yu , Zhenyu Hu
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- 代理商 Francois Pagette; Andrew M. Calderon
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/8234 ; H01L29/10
摘要:
The present disclosure relates to semiconductor structures and, more particularly, to semiconductor structures with uniform gate heights and methods of manufacture. The structure includes: short channel devices in a first area of an integrated circuit die; and long channel devices in a second area of the integrated circuit die. The long channel devices have a same gate height as the short channel devices.
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