Invention Grant
- Patent Title: Laser system
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Application No.: US15353235Application Date: 2016-11-16
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Publication No.: US10074958B2Publication Date: 2018-09-11
- Inventor: Osamu Wakabayashi , Masaki Arakawa , Kouji Kakizaki
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2014/066396 20140620; WOPCT/JP2014/068581 20140711
- Main IPC: G02B27/10
- IPC: G02B27/10 ; H01S3/13 ; G01J1/42 ; H01S3/00 ; H01S3/139 ; H01S3/23 ; H01S3/225

Abstract:
The laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled pulse laser beam, and a beam parameter measuring device provided in an optical path of the bundled pulse laser beam to measure a beam parameter of each one of the pulse laser beams and a beam parameter of the bundled pulse laser beam.
Public/Granted literature
- US20170063025A1 LASER SYSTEM Public/Granted day:2017-03-02
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