- 专利标题: High voltage integration for HKMG technology
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申请号: US15703116申请日: 2017-09-13
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公开(公告)号: US10050033B1公开(公告)日: 2018-08-14
- 发明人: Kong-Beng Thei , Chien-Chih Chou , Fu-Jier Fan , Hsiao-Chin Tuan , Yi-Huan Chen , Alexander Kalnitsky , Yi-Sheng Chen
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L27/02 ; H01L27/04 ; H01L21/8238 ; H01L27/092 ; H01L29/51
摘要:
The present disclosure relates to an integrated circuit (IC) and a method of formation. In some embodiments, a first oxide component is disposed on a substrate within a medium voltage region. A first high-k dielectric component is disposed on the substrate within a low voltage region and a second high-k dielectric component disposed on the first oxide component within the medium voltage region. A first gate electrode separates from the substrate by the first high-k dielectric component. A second gate electrode separates from the substrate by the first oxide component and the second high-k dielectric component.
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