- 专利标题: Deposition on two sides of a web
-
申请号: US14252633申请日: 2014-04-14
-
公开(公告)号: US10044046B2公开(公告)日: 2018-08-07
- 发明人: Ronald J. Mosso , Ghyrn E. Loveness
- 申请人: Amprius,Inc.
- 申请人地址: US CA Sunnyvale
- 专利权人: Amprius, Inc.
- 当前专利权人: Amprius, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Weaver Austin Villeneuve & Sampson LLP
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; H01M6/40 ; C23C16/02 ; C23C16/52 ; C23C16/54 ; C23C16/56 ; H01M4/04 ; H01M4/139 ; H01M4/38 ; C23C16/04 ; C23C16/22 ; C23C16/24 ; C23C16/26 ; C23C16/42 ; B05D1/00 ; H01M4/36 ; B82Y40/00
摘要:
Apparatuses and methods for depositing materials on both side of a web while it passes a substantially vertical direction are provided. In particular embodiments, a web does not contact any hardware components during the deposition. A web may be supported before and after the deposition chamber but not inside the deposition chamber. At such support points, the web may be exposed to different conditions (e.g., temperature) than during the deposition.
公开/授权文献
- US20140302232A1 DEPOSITION ON TWO SIDES OF A WEB 公开/授权日:2014-10-09
信息查询
IPC分类: