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发明授权
CN1939675B 机器人的机械手及使用该机械手的工件搬送机器人 失效 - 权利终止

机器人的机械手及使用该机械手的工件搬送机器人
摘要：
本发明提供一种在搬送在高温环境下进行处理的玻璃基板等工件时可高效且均匀地对机械手进行冷却、且与现有技术相比结构较轻的机械手及使用该机械手的工件搬送机器人。本发明的机器人的机械手包括：形成为具有与外部隔绝的中空部(11a)的形状、且用于承载工件的承载部(11)；将冷却介质导入承载部(11)一端侧的中空部(11a)的介质导入管(15)；以及从承载部(11)另一端侧的中空部(11a)排出冷却介质的介质排出口(17)。
摘要（英）：

The present invention provides a manipulator capable of efficiently and uniformly cooling the manipulator when a workpiece such as a glass substrate processed in hot environment is carried, and havinglightweight structure in comparison with a conventional one, and a workpiece carrying robot using the manipulator. The manipulator of a robot of the present invention comprises a loadbearing part 11which is formed in a shape having a hollow 11a insulated from the outside and for placing the workpiece thereon, medium introducing pipes 15 for introducing a cooling medium into the hollow 11a on oneend side of the loadbearing part 11, and a medium discharge opening 17 for discharging the cooling medium from the hollow 11a on the other end side of the loadbearing part 11.

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