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发明授权
CN1903449B 涂布装置和涂布方法 失效 - 权利终止

涂布装置和涂布方法
摘要：
本发明提供一种涂布装置和涂布方法，该涂布装置具有：将基板保持在其被涂布面面朝下的姿势并移动的移动框架；配置在由所述移动框架保持的所述基板的所述被涂布面下方的液槽；贮存在所述液槽中的涂布液在毛细管现象作用下被上升到所述被涂布面的同时液体地与所述被涂布面接触的喷嘴，所述移动框架具有吸附所述基板的吸盘，所述吸盘以向下的姿势吸附所述基板，通过使吸附于所述吸盘的基板保持水平并以一定水平速度移动，将所述涂布液涂布到所述被涂布面上。
摘要（英）：

It is a purpose of the present invention to uniformly dry, in a clean room in which down flow is constituted, a coated film formed on a surface to be coated of a substrate held in a state of that the surface to be coated looks down. In a coating apparatus comprising an absorption board holding a substrate in a state of that its surface to be coated looks down, and a coating mechanism that coats with coating liquid the surface to be coated of the substrate held by this absorption board, there is provided an air current generating apparatus which supplies clean gas toward the surface to be coated.

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