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发明授权
CN1814523B 传送用轴、辊刷轴及基板处理装置 有权

传送用轴、辊刷轴及基板处理装置
摘要：
本发明提供一种即使加长弯曲量也小的、用于传送基板的传送用轴。本发明的传送用轴，用于传送利用处理液进行处理的基板，该传送用轴包括：轴部(12)，具有由碳纤维形成的芯部件(13)和由对上述处理液有抗腐蚀性的合成树脂形成、包覆芯部件的外周面的外皮部件(14)；以及支承辊(6)，以预定间隔设置在该轴部的轴方向上，支承上述基板。
摘要（英）：

The present invention provides a conveyor shaft for conveying substrates with little bending even if it is elongated. The conveyor shaft for conveying substrates to be treated with a treatment liquidcomprises a core material made of carbon fiber, a shaft part with a coating material made of synthetic resin having resistance for the treatment liquid, coating the outer surface of the core material,and a supporting roller which supports substrates prepared at a predetermined interval in the axial direction of the shaft part.

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