知搜-全球专利检索

  1. 登录
  2. 注册
发明公开
CN108369335A 光束照射装置 有权

光束照射装置
摘要：
光束照射装置(10)具备：光源部(1)，输出光束(L)；光偏向部(2)，具有反射镜(21)和接受驱动信号的供给而使反射镜(21)摇动的驱动部(24)且以反射镜(21)接受从光源部(1)输出的光束(L)并进行反射；光偏向角度检测部(3)，具有接受由反射镜(21)反射的光束(L)的受光面(33a)并以光偏向部(2)的谐振频率的4倍以上的频率检测受光面(33a)上的光束(L)的位置并且输出表示该位置的检测信号；及动作控制部(4)，以该检测信号为基础来修正驱动信号并且将该修正了的驱动信号输出到光偏向部(2)。
摘要（英）：

A light beam irradiation device (10) comprises: a light source (1) for outputting a light beam (L); a light deflector (2) having a reflection mirror (21) and a drive unit (24) for receiving a drive signal and swinging the reflection mirror (21) therewith, the reflection mirror (21) receiving and reflecting the light beam (L) output from the light source (1); a light deflection angle detection unit(3) that has a light receiving surface (33a) for receiving the light beam (L) reflected by the reflection mirror (21), detects the position of the light beam (L) on the light receiving surface (33a)at a frequency that is at least four times greater than the resonance frequency of the light deflector (2), and outputs a detection signal indicating the position of the light beam; and an operation control unit (4) that corrects the drive signal on the basis of the detection signal and outputs the corrected drive signal to the light deflector (2).

公开/授权文献
0/0