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发明公开
CN108138315A 真空涂布系统中涂布超长片型基材，特别是玻璃板，装置及方法 失效 - 权利终止

真空涂布系统中涂布超长片型基材，特别是玻璃板，装置及方法
摘要：
本发明是关于在真空涂布系统中涂布超长片型基材，特别是玻璃板，的装置与方法，所述系统具有下列特征：a)设置在入口侧上的一系列连接的腔室，其由每一基材平板(9)通过，即锁定腔室(1)、缓冲腔室(2)以及传送腔室(3)，其中这些腔室中的每一个腔室的入口处可通过止回阀(8、11、15)以气密方式关闭，其中所述传送腔室(3)之后是处理腔室(4)的区域，且所述处理腔室(4)之后是出口侧系列连接的传送腔室(5)、缓冲腔室(7)与锁定腔室(8)；b)建构在辊子上的输送装置(10)；c)在缓冲腔室(2)的区域中具有适配凸缘(14)的单个高能真空泵(13)；d)在缓冲腔室(2)的区域中的至少2个流动挡板(12)；e)用于所述流动挡板(12)的纵向位移的系统(16)，和用于所述流动挡板(12)的高度调整的系统(17)；f)用于控制动态过程的组件。
摘要（英）：

The invention relates to a device and a method for coating extra-long sheet-type substrates, in particular glass panes, in a vacuum coating system, said system having the following features: a) a series connection of chambers, through which each substrate sheet (9) passes and which are arranged on the entry side, namely a load lock chamber (1), a buffer chamber (2) and a transfer chamber (3), theentry side of each of said chambers being vacuum-sealable by a check valve (8, 11, 15), wherein an area of process chambers (4) follows the transfer chamber (3) and an exit-side series connection of atransfer chamber (5), buffer chamber (7) and load lock chamber (8) follows the process chambers (4); b) a conveyor device (10) constructed on rollers; c) a single high-power vacuum pump (13) with anadapter flange (14) in the region of the buffer chamber (2); d) at least two flow baffles (12) in the region of the buffer chamber (2); e) a system (16) for the longitudinal displacement of the flow baffles (12) and a system (17) for adjusting the height of the flow baffles (12); f) an assembly for controlling the dynamic processes.

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