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发明公开
CN107800396A 一种采用压电单晶箔的固贴型薄膜体声波谐振器及制备方法 审中-实审

一种采用压电单晶箔的固贴型薄膜体声波谐振器及制备方法
摘要：
本发明的目的是提供一种采用压电单晶箔制作固贴型薄膜体声波谐振器的技术方案，所述压电单晶箔固贴型薄膜体声波谐振器由具有布拉格声波反射结构层的衬底，上下金属电极夹持压电体形成的三明治有源结构组成，所述压电体是压电单晶箔。本发明的优点有：1.压电单晶箔，晶体完整性未被破坏，为完美单晶；2.可以自由选择晶体及其晶向，优化器件性能；3.可以自由选择衬底材料，优化器件性能。
摘要（英）：

The invention aims at providing a technical scheme of producing a solidly mounted film bulk acoustic resonator by adopting a piezoelectric single crystal foil. The piezoelectric single crystal foil solidly mounted film bulk acoustic resonator is composed of a substrate with a Bragg acoustic reflection structural layer and a sandwich active structure which is formed by upper and lower metal electrodes and a piezoelectric body sandwiched between the upper and lower metal electrodes; and the piezoelectric body is the piezoelectric single crystal foil. The solidly mounted film bulk acoustic resonator adopting the piezoelectric single crystal foil and the preparation method thereof have the advantages that 1, the crystal perfection of the piezoelectric single crystal foil is not damaged, and the piezoelectric single crystal foil is a perfect single crystal; 2, the crystal and the crystal orientation can be selected freely, and the device performance can be optimized; and 3, the substrate material can be selected freely and the device performance can be optimized.

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