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发明公开
CN107104120A 磁感应器件及制造方法 有权 转让

磁感应器件及制造方法
摘要：
本发明提供的磁感应器件包括：衬底、第一金属层以及第一介质层，所述衬底的第一表面开设有凹槽，所述第一金属层设置于所述凹槽内，所述第一金属层的表面低于所述第一表面，所述第一金属层的表面与所述第一表面构成第一凹陷部，所述第一介质层设置于所述衬底的第一表面且所述第一介质层填充所述第一凹陷部。本发明实施例提供的磁感应器件以及制造方法通过第一金属层的表面低于衬底表面形成第一凹陷部，且第一介质层设置于衬底表面并填充第一凹陷部，使得第一金属层与表面金属层之间的介质厚度增加而其他区域的介质厚度不变，既能减小寄生电容和提高击穿电压，又能降低衬底翘曲以及介质层剥离的风险。
摘要（英）：

The invention provides a magnetic induction device. The magnetic induction device comprises a substrate, a first metal layer and a first dielectric layer; a groove is formed in the first surface of the substrate; the first metal layer is arranged in the groove; the surface of the first metal layer is lower than the first surface; the surface of the first metal layer and the first surface form a first concave part; and the first dielectric layer is arranged on the first surface of the substrate and the first concave part is filled with the first dielectric layer. According to the magnetic induction device and the manufacturing method therefor provided by the embodiments, the surface of the first metal layer is lower than the surface of the substrate to form the first concave part; in addition, the first dielectric layer is arranged on the surface of the substrate and the first concave part is filled with the first dielectric layer, so that the thickness of the dielectric between the first metal layer and the surface metal layer is increased while the thickness of the dielectric in other regions is unchanged; and therefore, stray capacitance can be lowered, breakdown voltage can be improved, and risk of substrate warping and dielectric layer stripping also can be lowered.

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