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CN106059525A 体声波谐振器及包括该体声波谐振器的滤波器 无效 - 撤回

体声波谐振器及包括该体声波谐振器的滤波器
Abstract:
在示例中，提供了一种体声波谐振器及包括该体声波谐振器的滤波器，所述体声波谐振器包括：基板；第一电极和第二电极，形成在基板上；压电层，形成在第一电极与第二电极之间，其中，第一电极和第二电极中的至少一个由包括钼元素的合金形成。另外，这样的体声波谐振器可包括形成在基板与第一电极之间的气腔。
Abstract(English):

In examples, there is provided a bulk acoustic wave resonator including: a substrate, a first electrode and a second electrode formed on the substrate, and a piezoelectric layer formed between the first electrode and the second electrode, wherein at least one of the first electrode and the second electrode is formed of an alloy including a molybdenum element. Additionally, such a bulk acoustic wave resonator may include an air cavity formed between the substrate and the first electrode.

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