知搜-全球专利检索

  1. 登录
  2. 注册
发明授权
CN106017466B 电容型MEMS惯性传感器闭环检测的电容电压转换电路 有权

电容型MEMS惯性传感器闭环检测的电容电压转换电路
摘要：
本发明公开了一种电容型MEMS惯性传感器闭环检测的电容电压转换电路，包括输入共模反馈模块、第一放大模块和第二放大模块；输入共模反馈模块的反相输入端和反馈输出端与电容型MEMS惯性传感器的输出端和第一放大模块的输入端电连接，输入共模反馈模块的正相输入端接地；第一放大模块的输出端与第二放大模块的输入端电连接；第一放大模块还与第一复位信号输入端连接，第二放大模块还与第二复位信号输入端连接；在第一复位信号输入端停止输入第一复位信号预设时间后，第二复位信号输入端再停止输入第二复位信号。上述电容型MEMS惯性传感器闭环检测的电容电压转换电路，检测准确性高、噪声低且转换精度高。
摘要（英）：

The invention discloses a capacitance and voltage conversion circuit for closed-loop detection of a capacitive MEMS inertial sensor. The capacitance and voltage conversion circuit comprises an input common-mode feedback module, a first amplification module and a second amplification module, wherein the inverted input terminal and the feedback output terminal of the input common-mode feedback module are electrically connected with the output terminal of the capacitive MEMS inertial sensor and the input terminal of the first amplification module, and the normal phase input terminal of the input common-mode feedback module is grounded; the output terminal of the first amplification module is electrically connected with the input terminal of the second amplification module; the first amplification module is also connected with a first reset signal input terminal, and the second amplification module is connected with a second reset signal input terminal; after the first reset signal input terminal stops inputting a first rest signal for a preset period of time, the second reset signal input terminal stops inputting a second reset signal. The capacitance and voltage conversion circuit for closed-loop detection of the capacitive MEMS inertial sensor is high in detection accuracy and conversion precision and low in noise.

公开/授权文献
0/0