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CN105947974A 一种用于氧化锌纳米线及阵列生长的十字架（+）型激光烧蚀管式炉 无效 - 驳回

一种用于氧化锌纳米线及阵列生长的十字架（+）型激光烧蚀管式炉
摘要：
本发明公开了一种用于氧化锌纳米线及阵列生长的激光烧蚀十字架（+）型管式炉，包括靶材控制系统、载气流量控制系统、衬底加热系统、炉体、十字型石英管、真空获得与控制系统。本发明的激光烧蚀十字架（+）型管式炉具有高真空，靶材更换方便，实验方案灵活多变；能够实时掺杂，沉积速率可调等。（1）通过激光烧蚀十字架（+）型管式炉装置，可在蓝宝石衬底上生长高密度（10/μm2）氧化锌纳米线阵列；（2）通过在衬底上生长一层氧化锌缓冲层，用激光烧蚀十字架（+）型管式炉装置生长低密度（0.1/μm2）氧化锌纳米线阵列；（3）在缓冲层上生长的氧化锌纳米线阵列的密度，随着靶材与衬底之间距离的增大而增大。
摘要（英）：

The invention discloses a cross-shaped laser ablation tube-type furnace used for Zinc oxide nanowires and array growth. The cross-shaped laser ablation tube-type furnace comprises a target material control system, a carrier gas flow control system, a liner heating system, a furnace body, a cross-shaped quartz tube, and a vacuum acquisition and control system. The cross-shaped laser ablation tube-type furnace is featured by high vacuum, convenient replacement of target material, flexible and changeable experiment schemes and real-time doping and adjustable sedimentation rate. (1) Through the cross-shaped laser ablation tube-type furnace, Zinc oxide nanowire arrays of high density (10/microns 2) grow on a sapphire liner. (2) Through a layer of Zinc oxide buffer layer growing on a liner, Zinc oxide nanowire arrays of low density (0.1/microns 2) grow on a sapphire liner. (3) density of Zinc oxide nanowire arrays growing the buffer layer varies with the increase of distance between the target material and liners.

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