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发明授权
CN105759566B 压印装置、压印方法以及物品的制造方法 有权

压印装置、压印方法以及物品的制造方法
摘要：
本发明提供压印装置、压印方法以及物品的制造方法。所述压印装置通过使用模具来对基板上的压印材料形成图案，所述压印装置包括：倾斜单元，其被构造为使所述模具和所述基板相对地倾斜；检测单元，其被构造为检测由所述模具反射的光与由所述基板反射的光之间的干涉图案；以及控制单元，其被构造为，基于在所述模具与所述基板上的压印材料彼此接触的状态下、由所述检测单元检测到的所述干涉图案，控制所述倾斜单元，以减小在所述状态下、所述模具和所述基板之间的相对倾斜。
摘要（英）：

The present invention provides an imprint apparatus which forms a pattern in an imprint material on a substrate by using a mold, the apparatus including a tilt unit configured to tilt the mold and the substrate relatively, a detection unit configured to detect an interference pattern between light reflected by the mold and light reflected by the substrate, and a control unit configured to control, based on the interference pattern detected by the detection unit in a state in which the mold and the imprint material on the substrate are in contact with each other, the tilt unit to reduce relative tilts between the mold and the substrate in the state.

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