The invention discloses a Z-axis structure of an accelerometer and a production method of the Z-axis structure. The Z-axis structure of the accelerometer comprises a substrate, a fixed electrode and a mass block, wherein a first anchor point is arranged on the surface of the substrate; an end of the fixed electrode is connected to the first anchor point; the fixed electrode is suspended above the substrate through the first anchor point; a middle anchor point is also arranged on the surface of the substrate; and the mass block is suspended above the fixed electrode through the middle anchor point. The fixed electrode of the Z-axis structure is connected with the substrate through the first anchor point, so that a certain gap is formed between the fixed electrode and the substrate, a deformation transmission channel from the substrate to the fixed electrode is cut off, the area of a portion, which is in contact with the substrate, of the fixed electrode is reduced, the circumstance that deformation of the substrate is transmitted to the fixed electrode due to change of external stress and change of external temperature can be avoided effectively, and zero drift of the Z-axis structure is greatly reduced.