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Invention Publication
CN104267495A 驱动微反射镜的方法和装置 有权

驱动微反射镜的方法和装置
Abstract:
微光刻投射曝光设备的照明系统(10)中的微反射镜阵列(22)的微反射镜(24)，可关于两个倾斜轴(x、y)通过各倾斜角度(αx、αy)倾斜。微反射镜(24)被分配三个驱动器(E1、E2、E3)，所述三个驱动器可以通过控制信号(U1、U2、U3)被分别驱动，从而使得微反射镜(24)关于所述两个倾斜轴(x、y)倾斜。规定两个控制变量(SGx、SGy)，其每个被分配给一个倾斜轴(x、y)且其两者被分配给未被干扰的倾斜角度(αx、αy)。对于两个控制变量(SGx、SGy)的任何希望的组合，根据两个控制变量(SGx、SGy)，选择三个驱动器中的一个驱动器(E1)并将其控制信号(U1)设为常数值，具体地0。确定控制信号(U1、U2、U3)，使得当控制信号(U1、U2、U3)被施加到其它两个驱动器(E2、E3)时，微反射镜(24)根据两个控制变量(SGx、SGy)采用未被干扰倾斜角度(αx、αy)。
Abstract(English):

A micromirror (24) of a micromirror array (22) in an illumination system (10) of a microlithographic projection exposure apparatus can be tilted through a respective tilt angle (alphax, alphay) about two tilt axes (x, y). The micromirror (24) is assigned three actuators (E1, E2, E3) which can respectively be driven by control signals (U1, U2, U3) in order to tilt the micromirror (24) about the two tilt axes (x, y). Two control variables (SGx, SGy) are specified, each of which is assigned to one tilt axis (x, y) and which are both assigned to unperturbed tilt angles (alphax, alphay). For any desired combinations of the two control variables (SGx, SGy), as a function of the two control variables (SGx, SGy), one (E1) of the three actuators is selected and its control signal (U1) is set to a constant value, in particular zero. The control signals (U1, U2, U3) are determined so that, when the control signals (U1, U2, U3) are applied to the other two actuators (E2, E3), the micromirror (24) adopts the unperturbed tilt angles (alphax, alphay) as a function of the two control variables (SGx, SGy).

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