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发明公开
CN102510995A 复合传感器 失效 - 权利终止

复合传感器
摘要：
本发明的复合传感器，具有：第一单元，其包括相互对称地配置且能够沿驱动方向及检测方向进行位移的第一及第二振动器；第二单元，其包括相互对称地配置且能够沿与所述驱动方向及所述检测方向相同的轴向进行位移的第三及第四振动器；驱动部，其驱动所述第一、第二、第三及第四振动器，以使所述第一及第二驱动件彼此、所述第三及第四振动器彼此以相互相反的相位进行振动，并使所述第一单元及所述第二单元彼此也以相互相反的相位进行振动；以及检测部，其检测所述第一、第二、第三及第四振动器的所述检测方向的位移。
摘要（英）：

A composite sensor comprises: a first unit including first and second vibrators arranged symmetrically relative to each other and capable of being displaced in the direction of drive and the direction of detection; a second unit including third and fourth vibrators arranged symmetrically relative to each other and capable of being displaced in the directions same as the direction of drive and the direction of detection; a drive section for driving the first, second, third, and fourth vibrators so that the first and second vibrators vibrate in the opposite phases, the third and fourth vibrators vibrate in the opposite phases, and the first unit and the second unit vibrate in the opposite phases; and a detection section for detecting the displacements of the first, second, third, and fourth vibrators in the direction of detection.

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