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CN102057332A 用于热调节光学元件的方法和系统 有权

用于热调节光学元件的方法和系统
摘要：
提供一种用于热调节光学元件的方法，所述方法包括：用辐射照射光学元件的步骤；不用辐射照射所述光学元件的步骤；在所述光学元件和保持在调节流体储存器内的调节流体之间实现热流动；和提供所述调节流体的流体流动，以提供热调节后的流体至所述储存器。所述流体在所述光学元件的照射期间的流量低于所述光学元件不被照射时所述流体的流量。
摘要（英）：

A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

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