The invention relates to a three-stage temperature annealing process for a 30CrMnSiA cold rolled steel part, which is realized at three different temperature stages, i.e. ferrite and cementite diffuse at the first-stage temperature of 650 DEG C, austenite nucleates and grows up at the second-stage temperature of 800-810 DEG C, and the austenite is converted into the ferrite and a carbide which is further relocated and diffused to form a spherical carbide at the third-stage temperature of 660-670 DEG C; and the aim of improving the deformation of a 30CrMnSiA cold rolled steel plate is achieved by the three-stage temperature. For the same material and rolled steel in the same furnace, compared with the traditional annealing process, the annealing process can further improve the plastic deformation and the elongation percentage of the 30CrMnSiA cold rolled steel plate during punching and can reduce the punching cracks of the steel plate.