Disclosed is a trichlorosilane production apparatus comprising: a reaction vessel into which a feed gas comprising tetrachlorosilane and hydrogen is supplied to generate a reaction product gas comprising trichlorosilane and hydrogen chloride; a heating mechanism for heating the reaction vessel; a gas supply unit for supplying the feed gas into the reaction vessel; and a gas discharge unit for discharging the reaction product gas out of the reaction vessel. In the inside of the reaction vessel, a reaction flow passage which is constituted by multiple small spaces. The multiple small spaces areseparated from one another by multiple reaction cylinder walls arranged almost concentrically and having different inner diameters, and are communicated in turn from the inside via penetrating parts alternately formed on the upper part and the bottom part of the reaction cylinder walls. The gas supply unit and the gas discharge unit are connected to the reaction flow passage.