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发明公开
CN101357846A 具有可控电阻率的耐等离子体腐蚀陶瓷 无效 - 驳回 复审申请

具有可控电阻率的耐等离子体腐蚀陶瓷
摘要：
本发明公开了在采用腐蚀/侵蚀性等离子体的半导体处理条件下抵抗腐蚀/侵蚀的特种陶瓷材料。腐蚀性等离子体可为含卤等离子体。对该特种陶瓷材料已经改性以提供抑制等离子体电弧放电可能的可控电阻率。
摘要（英）：

Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential.

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