A probe which is cleaning-free, of which rubbing operation can be precisely controlled, and can be used for narrow-pitch pads, is provided. The probe assembly includes: a Z-deforming portion elastically deformable at least in a vertical direction; a tip contact element which includes a contact portion having a curved section, the tip contact element being connected to and supported on an end of the Z-deforming portion via an arm member, the contact portion being made to contact with an electrode pad and is vertically displaceable and rotatable; and a stopper for restricting movement of the tip contact element. After the tip contact element is rotated, due to pushing force from the electrode pad, for a certain distance in a direction of rotation, the stopper controls the movement of the tip contact element to prevent further rotation and to allow vertical movement.