公开(公告)号：US07359176B2

公开(公告)日：2008-04-15

申请号：US11066503

申请日：2005-02-24

申请人： Manabu Miyaishi ,  Takeshi Ogawa ,  Yoshihiro Ushio ,  Masakazu Yasui ,  Nobuyuki Tanaka

发明人： Manabu Miyaishi ,  Takeshi Ogawa ,  Yoshihiro Ushio ,  Masakazu Yasui ,  Nobuyuki Tanaka

IPC分类号： H02T23/00

CPC分类号： B03C3/383 ,  A61L9/22 ,  B03C3/32 ,  H01T23/00

摘要： Provided is a board for ion generation that is capable of generating negative ions with much better efficiency and in an amount larger than that of positive ions. In the board for ion generation, a discharge electrode is formed on one principal surface of a substrate formed of ceramics, an induction electrode is formed on another principal surface of the substrate, the discharge electrode and the induction electrode being disposed opposite to each other, a first protective layer and a second protective layer are formed so as to cover the discharge electrode and the induction electrode, respectively. Surface discharge is generated on a surface of the first protective layer by applying an AC voltage between the discharge electrode and induction electrode, and positive ions and negative ions are alternately generated in the air. In the board for ion generation, the porosity of the substrate is 5 to 10 vol. %.

摘要翻译： 提供了一种用于离子产生的板，其能够以比正离子更大的效率产生负离子。 在用于离子生成的基板中，在由陶瓷形成的基板的一个主面上形成放电电极，在基板的另一主面上形成感应电极，放电电极和感应电极相对配置， 形成第一保护层和第二保护层，以分别覆盖放电电极和感应电极。 通过在放电电极和感应电极之间施加交流电压而在第一保护层的表面上产生表面放电，在空气中交替产生正离子和负离子。 在用于离子生成的板中，基材的孔隙率为5〜10体积％。 ％。

公开(公告)号：US08270141B2

公开(公告)日：2012-09-18

申请号：US12884967

申请日：2010-09-17

申请人： Michael D. Willwerth ,  David Palagashvili ,  Douglas A. Buchberger, Jr. ,  Michael G. Chafin

发明人： Michael D. Willwerth ,  David Palagashvili ,  Douglas A. Buchberger, Jr. ,  Michael G. Chafin

IPC分类号： H02T23/00

CPC分类号： H01L21/6833 ,  Y10T279/23

摘要： Embodiments of electrostatic chucks are provided herein. In some embodiments, an electrostatic chuck may include a body having a notched upper peripheral edge, defined by a first surface perpendicular to a body sidewall and a stepped second surface disposed between the first surface and a body upper surface, and a plurality of holes disposed through the body along the first surface; a plurality of fasteners disposed through the plurality of holes to couple the body to a base disposed beneath the body; a dielectric member disposed above the body upper surface to electrostatically retain a substrate; an insulator ring disposed about the body within the notched upper peripheral edge and having a stepped inner sidewall that mates with the stepped second surface to define a non-linear interface therebetween; and an edge ring disposed over the insulator ring, the non-linear interface limiting arcing between the edge ring and the fastener.

摘要翻译： 本文提供了静电卡盘的实施例。 在一些实施例中，静电吸盘可以包括具有切口的上周边边缘的主体，该顶部边缘由垂直于主体侧壁的第一表面和设置在第一表面和主体上表面之间的阶梯状第二表面限定， 沿着第一面穿过身体; 多个紧固件，其布置成穿过所述多个孔，以将所述主体连接到设置在所述主体下方的底座; 设置在所述主体上表面上方的电介质部件，以静电保持基板; 绝缘体环，其围绕所述主体设置在所述凹口的上周边边缘内并且具有与所述阶梯状的第二表面配合的阶梯状的内侧壁，以在其间界定非线性界面; 以及设置在所述绝缘体环上的边缘环，所述非线性界面限制所述边缘环和所述紧固件之间的电弧。