公开(公告)号：US12119216B2

公开(公告)日：2024-10-15

申请号：US18336552

申请日：2023-06-16

Applicant: Beijing E-Town Semiconductor Technology Co., Ltd. ,  Mattson Technology, Inc.

Inventor： Michael X. Yang ,  Rolf Bremensdorfer ,  Dave Camm ,  Joseph Cibere ,  Dieter Hezler ,  Shawming Ma ,  Yun Yang

IPC: H01J61/073 ,  H01J61/28 ,  H01J61/52 ,  H01J61/86 ,  H05H1/48

CPC classification number: H01J61/86 ,  H01J61/0732 ,  H01J61/28 ,  H01J61/526 ,  H05H1/48

Abstract: Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.

公开(公告)号：US20230352294A1

公开(公告)日：2023-11-02

申请号：US18336552

申请日：2023-06-16

Applicant: Beijing E-Town Semiconductor Technology Co., Ltd. ,  Mattson Technology, Inc.

Inventor： Michael X. Yang ,  Rolf Bremensdorfer ,  Dave Camm ,  Joseph Cibere ,  Dieter Hezler ,  Shawming Ma ,  Yun Yang

IPC: H01J61/86 ,  H01J61/073 ,  H05H1/48 ,  H01J61/52 ,  H01J61/28

CPC classification number: H01J61/86 ,  H01J61/0732 ,  H05H1/48 ,  H01J61/526 ,  H01J61/28

Abstract: Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.

公开(公告)号：US11076457B2

公开(公告)日：2021-07-27

申请号：US16135082

申请日：2018-09-19

Applicant: SEIKO EPSON CORPORATION

Inventor： Junichi Suzuki ,  Masaru Kono

IPC: H05B41/36 ,  H01J61/86 ,  G03B21/20 ,  H05B41/28 ,  H05B41/292 ,  H05B41/288

Abstract: A discharge lamp drive device includes a discharge lamp driver adapted to supply a drive current to a discharge lamp having a first electrode and a second electrode, a control section adapted to control the discharge lamp driver, and a storage section adapted to store a plurality of drive patterns of the drive current. Each of the plurality of drive patterns has a plurality of drive parameters. The control section executes at least three of the drive patterns in a case in which drive power to be supplied to the discharge lamp is in a predetermined power band, and in a case in which an inter-electrode voltage of the discharge lamp is a predetermined voltage value. Any two of the at least three drive patterns are different from each other in a value of at least one of the plurality of drive parameters.

公开(公告)号：US10056245B2

公开(公告)日：2018-08-21

申请号：US15276826

申请日：2016-09-27

Applicant: OSRAM GmbH

Inventor： Maria Nilius

IPC: H01J61/073 ,  H01J61/86

CPC classification number: H01J61/0737 ,  H01J61/0732 ,  H01J61/0735 ,  H01J61/86

Abstract: A DC gas discharge lamp includes an anode and a cathode having a first cathode segment, which forms the surface of the cathode at least in a region of the cathode which faces the anode and has an arc attachment region, within which an arc burning between the cathode and the anode attaches during lamp operation as intended. The first cathode segment consists of tungsten with at least one emitter material for reducing the work function of electrons from the cathode. The cathode is embodied in a manner free of thorium. The at least one emitter material has a melting point of less than 3200 K. At least one part of the surface of the cathode outside the arc attachment region is formed by a diffusion barrier for the at least one emitter material.

公开(公告)号：US09952489B2

公开(公告)日：2018-04-24

申请号：US15225208

申请日：2016-08-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomohiro Yokoo

IPC: G03B21/20 ,  H01J61/073 ,  H01J61/26 ,  H01J61/33 ,  H01J61/86

CPC classification number: G03B21/2026 ,  G03B21/2053 ,  H01J61/0732 ,  H01J61/26 ,  H01J61/33 ,  H01J61/86

Abstract: The disclosure relates to a discharge lamp including a light emitting tube having a discharge space therein, and a pair of electrodes disposed in the discharge space so as to be opposed to each other, wherein a changing rate of a cross-sectional area is equal to or lower than 200%. The changing rate is a rate of change of the cross-sectional area in every 0.25 mm in a direction along an optical axis of the light emitting tube. The cross-sectional area is an area of a plane perpendicular to the optical axis in a space between an outside shape of at least one of the pair of electrodes and an inside wall of the light emitting tube.

公开(公告)号：US20160211130A1

公开(公告)日：2016-07-21

申请号：US15025269

申请日：2014-09-12

Applicant: PHILIPS LIGHTING HOLDING B.V.

Inventor： Olga Borisovna MINAYEVA

IPC: H01J61/073 ,  H01J61/86

CPC classification number: H01J61/0737 ,  H01J61/0732 ,  H01J61/86

Abstract: An electrode for a short-arc high-pressure discharge device is disclosed. The electrode includes a body made from a thoriated tungsten material. The body forms a tip at one end. A coating layer covers a part of the thoriated tungsten material so that an area around the tip is not covered by the coating layer.

Abstract translation: 公开了一种用于短弧高压放电装置的电极。 电极包括由钍钨材料制成的主体。 身体在一端形成尖端。 涂层覆盖钍钨材料的一部分，使得尖端周围的区域不被涂层覆盖。

公开(公告)号：US08952621B2

公开(公告)日：2015-02-10

申请号：US13990079

申请日：2012-10-19

Applicant: Panasonic Corporation

Inventor： Hiroji Morimoto ,  Syunsuke Ono ,  Minoru Ozasa

IPC: H05B37/02 ,  H05B39/02 ,  H05B39/04 ,  H05B41/36 ,  H05B41/24 ,  H05B41/288 ,  H05B41/292 ,  H01J61/12 ,  H01J61/86 ,  G03B21/20

CPC classification number: H05B41/24 ,  G03B21/2026 ,  G03B21/206 ,  H01J61/125 ,  H01J61/86 ,  H05B41/2883 ,  H05B41/2928 ,  Y02B20/204

Abstract: A calculation processing sub-unit controls a frequency control sub-unit and a DC-AC inverter circuit to repeat a first period and a second period. The first period continues for at least two cycles, each cycle including a first sub-period during which the current is maintained in one polarity and a second sub-period during which the current is maintained in an opposite polarity. The second sub-period is shorter than and subsequent to the first sub-period. The second period, during which the current is maintained in a constant polarity, is as long as or longer than the first sub-period. The calculation processing sub-unit controls a PWM control sub-unit and a voltage step-down circuit to maintain an absolute value of the current at a first current value during at least part of the first period, and at a second current value, greater than the first current value, during the second period.

Abstract translation: 计算处理子单元控制频率控制子单元和DC-AC逆变器电路，以重复第一周期和第二周期。 第一周期持续至少两个周期，每个周期包括第一子周期，在该第一子周期期间电流保持在一个极性，在第二子周期期间，电流保持在相反的极性。 第二个子期间比第一个子期间短。 电流保持恒定极性的第二期间长于或长于第一子期间。 计算处理子单元控制PWM控制子单元和电压降压电路，以在第一周期的至少部分期间将电流的绝对值保持在第一电流值，并且在第二电流值更大 比第一个当前值，在第二个时期。

公开(公告)号：US06960884B2

公开(公告)日：2005-11-01

申请号：US10867774

申请日：2004-06-16

Applicant: Tomoyoshi Arimoto ,  Katumi Sugaja ,  Yoshikazu Suzuki

Inventor： Tomoyoshi Arimoto ,  Katumi Sugaja ,  Yoshikazu Suzuki

IPC: H05B41/24 ,  H01J61/073 ,  H01J61/20 ,  H01J61/26 ,  H01J61/86 ,  H05B41/18 ,  H05B41/292 ,  H05B41/38 ,  H01J17/20 ,  H05B37/02

CPC classification number: H05B41/388 ,  H01J61/0732 ,  H01J61/26 ,  H01J61/86 ,  H05B41/2928 ,  Y02B20/204 ,  Y02B20/208

Abstract: A short arc ultra-high pressure mercury lamp, at least one of the electrodes of which has a melted part towards the electrode head and a coil part which extends from the melted part continuously and integrally with it in a direction away from the electrode head, avoids blackening of the tube wall and achieves a long service life by the provision of a power supply which supplies the discharge lamp with direct current when operation is starting and afterwards supplies it with an alternating current, the direct current supplied by the power supply to the discharge lamp being initially 0.3 to 0.6 times as great as the rated current and afterwards increasing to 1.0 to 2.0 times are great as the rated current.

Abstract translation: 一种短弧超高压汞灯，其电极中的至少一个具有朝向电极头的熔化部分，以及线圈部分，其从熔融部分沿远离电极头的方向连续地和一体地延伸， 避免管壁变黑，通过提供在运行开始时向放电灯提供直流电的电源并且随后向其提供交流电而使电源供应的直流电流达到长期使用寿命 放电灯的初始值为额定电流的0.3〜0.6倍，之后增加到1.0〜2.0倍。

公开(公告)号：US20050236996A1

公开(公告)日：2005-10-27

申请号：US10515469

申请日：2003-05-16

Applicant: Arnd Ritz ,  Kai Grassie

Inventor： Arnd Ritz ,  Kai Grassie

IPC: H01J61/86 ,  H01J61/00 ,  H01J61/30 ,  H01J61/35 ,  H01J61/52 ,  H01J61/82 ,  H01J61/84

CPC classification number: H01J61/35

Abstract: The invention relates to a high-pressure gas discharge lamp which comprises at least a lamp bulb (1) hermetically enclosing a discharge space (21) filled with a gas, a functional layer (3), and a light emission opening (5), the latter two being arranged on the outer surface of the lamp bulb, wherein a second layer (4) covers further regions of the surface of the lamp bulb which do not serve the purpose of the functional layer, while the lamp can be operated at a power such that, given the power level of the lamp, a devitrification of the lamp bulb (1) and a condensation of the gas are substantially prevented.

Abstract translation: 本发明涉及一种高压气体放电灯，其包括至少一个灯泡（1），其密封地填充有气体的放电空间（21），功能层（3）和发光开口（5）， 后两个布置在灯泡的外表面上，其中第二层（4）覆盖不用于功能层的目的的灯泡的表面的另外的区域，而灯可以在 功率使得在灯的功率水平下，基本上防止了灯泡（1）的失透和气体的冷凝。

公开(公告)号：US06940217B2

公开(公告)日：2005-09-06

申请号：US10307984

申请日：2002-12-03

Applicant: Masanobu Komiya ,  Yoshitaka Kanzaki ,  Toyohiko Kumada

Inventor： Masanobu Komiya ,  Yoshitaka Kanzaki ,  Toyohiko Kumada

IPC: H01J9/32 ,  H01J17/04 ,  H01J61/00 ,  H01J61/073 ,  H01J61/20 ,  H01J61/36 ,  H01J61/82 ,  H01J61/86

CPC classification number: H01J61/368 ,  H01J61/86

Abstract: To devise an arrangement with relatively high pressure tightness, in a short-arc super-high pressure mercury lamp which is operated with an extremely high mercury vapor pressure, a light emitting part has a pair of opposed electrodes and is filled with at least 0.15 mg/mm3 of mercury; and side tube parts extend from opposite sides of the light emitting part, and in which the electrodes are partially hermetically sealed and are each welded to a respective metal foil, in the areas in which the electrodes are welded to the metal foils, the electrodes are deformed in the direction perpendicular to the metal foils to a degree of deformation that is at most 10%.

Abstract translation: 为了设计具有相对高的压力密封性的布置，在以非常高的水银蒸汽压力操作的短弧超高压水银灯中，发光部分具有一对相对的电极，并且填充有至少0.15mg / mm 3的汞; 并且侧管部分从发光部分的相对侧延伸，并且其中电极被部分气密地密封并且各自焊接到相应的金属箔，在电极焊接到金属箔的区域中，电极是 在垂直于金属箔的方向上变形至至多10％的变形程度。