公开(公告)号：US08724088B2

公开(公告)日：2014-05-13

申请号：US13588844

申请日：2012-08-17

申请人： Jiin-Hong Lin ,  Chih-Chen Chen ,  Ming-Tao Ho

发明人： Jiin-Hong Lin ,  Chih-Chen Chen ,  Ming-Tao Ho

IPC分类号： G03B27/64 ,  G03F1/14

CPC分类号： G03F1/64

摘要： An apparatus is provided for mounting a pellicle to a photomask. A chamber has at least one port for filling the chamber with extreme clean dry air (XCDA) or an inert gas. A pellicle mounter is provided within the chamber. The mask is irradiated with a vacuum ultra violet (VUV) light in an atmosphere of the XCDA or inert gas, and the pellicle is mounted to the mask while the mask is in the atmosphere of the XCDA or inert gas and exposed to the VUV light. An assembly includes the mask attached to a pellicle frame by a pressure sensitive adhesive; and a pellicle joined to the pellicle frame, forming a sealed enclosure, the sealed enclosure being filled with extreme clean dry air (XCDA) or inert gas.

摘要翻译： 提供了一种用于将防护薄膜组件安装到光掩模的装置。 室具有至少一个端口，用于用极端干净的干燥空气（XCDA）或惰性气体填充室。 在室内提供防护薄膜贴片机。 在XCDA或惰性气体的气氛中用真空紫外线（VUV）照射掩模，并且将掩模安装在掩模上，同时掩模在XCDA或惰性气体的气氛中并暴露于VUV光 。 组件包括通过压敏粘合剂附着到防护薄膜框架上的面罩; 和防护薄膜组件连接到防护薄膜组件框架上，形成密封的外壳，密封的外壳装满极干净的干燥空气（XCDA）或惰性气体。

公开(公告)号：US20130155385A1

公开(公告)日：2013-06-20

申请号：US13818567

申请日：2011-08-23

申请人： Fardad Hashemi ,  Douglas C. Watson

发明人： Fardad Hashemi ,  Douglas C. Watson

IPC分类号： G03B27/64

CPC分类号： G03F1/64 ,  G03B27/64 ,  G03F1/66 ,  G03F7/70841 ,  G03F7/70908 ,  H01L21/6719

摘要： A chamber assembly (26) for providing a sealed chamber (40) adjacent to a workpiece (28) to counteract the influence of gravity on the workpiece (28) includes a chamber housing (244), and a seal assembly (33) that expands and/or contracts to better seal against the workpiece (28). Further, the chamber assembly (26) can include one or more transducer assemblies (34) that expand or contract to quickly respond to leaks or injections of fluid in chamber assembly (26) to maintain a constant and stable chamber pressure in the chamber assembly (26). Moreover, the chamber assembly (26) can utilize a pressure source (35) that directs a lager amount of fluid (374) through a fluid passageway (368) to accurately maintain the pressure within the chamber assembly (26).

摘要翻译： 用于提供与工件（28）相邻的密封腔（40）以抵抗重力对工件（28）的影响的室组件（26）包括腔室壳体（244）和膨胀的密封组件（33） 和/或收缩以更好地密封工件（28）。 此外，腔室组件（26）可以包括一个或多个换能器组件（34），其膨胀或收缩以快速响应腔室组件（26）中的流体的泄漏或喷射，以保持腔室组件中恒定且稳定的腔室压力（ 26）。 此外，腔室组件（26）可以利用压力源（35），该压力源将较大量的流体（374）引导通过流体通道（368）以精确地保持腔室组件（26）内的压力。

公开(公告)号：US07526189B2

公开(公告)日：2009-04-28

申请号：US11477417

申请日：2006-06-30

申请人： Hiroshi Nomura ,  Shinya Suzuka ,  Ken Endo

发明人： Hiroshi Nomura ,  Shinya Suzuka ,  Ken Endo

IPC分类号： G03B17/00 ,  G03B27/64 ,  G03B7/02

CPC分类号： G03B17/04 ,  G03B5/02 ,  G03B2205/0038 ,  G03B2217/005 ,  H04N5/2254 ,  H04N5/23248 ,  H04N5/23258 ,  H04N5/23287

摘要： An image stabilizer includes a guide device which guides an image-stabilizing optical element in a guide direction orthogonal to an optical axis and an image shake counteracting driving device which moves the image-stabilizing optical element so as to counteract image shake, including a first moving element moved by a drive source; a second moving element movable relative to the first moving element, and applies a moving force to a holder holding the image-stabilizing optical element when the second moving element is moved by the first moving element; and a moving-element control mechanism which resiliently connects the first and second moving elements to each other to allow the first and second moving elements to selectively move integrally and relative to each other in accordance with a magnitude of a resistance to a movement between the drive source and the holder.

摘要翻译： 图像稳定器包括引导装置，引导装置引导与光轴正交的引导方向的图像稳定光学元件和移动图像稳定光学元件以抵消图像抖动的图像抖动反作用驱动装置，包括第一移动 元素由驱动源移动; 第二移动元件，其相对于所述第一移动元件可移动，并且当所述第二移动元件被所述第一移动元件移动时，向保持所述图像稳定光学元件的保持器施加移动力; 以及移动元件控制机构，其将第一和第二移动元件弹性地彼此连接，以允许第一和第二移动元件根据对驱动器之间的移动的阻力的大小而选择性地整体移动并相对于彼此移动 来源和持有人。

公开(公告)号：US20070052946A1

公开(公告)日：2007-03-08

申请号：US11457582

申请日：2006-07-14

申请人： Peter Heiland

发明人： Peter Heiland

IPC分类号： G03B27/42 ,  G03B27/62 ,  F16M13/00 ,  G03B27/64

CPC分类号： F16F15/04 ,  F16F15/0275 ,  G03F7/70716 ,  G03F7/709

摘要： The invention is in particular a supporting device for relative supporting loads with respect to a base comprising a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls.

摘要翻译： 本发明特别地涉及一种用于相对于基座的相对承载负载的支撑装置，该基座包括负载侧部分，基部侧部分和向负载侧部分提供支撑的中间部分，并且因此限定了支撑方向 基座和负载侧，包括由室壁限定的压力室。

公开(公告)号：US5966203A

公开(公告)日：1999-10-12

申请号：US26751

申请日：1998-02-20

申请人： Michael L. Bowen

发明人： Michael L. Bowen

IPC分类号： A61M1/00 ,  G03B27/60 ,  G03B27/64 ,  G03B27/62

CPC分类号： A61M1/008 ,  G03B27/60 ,  G03B27/64

摘要： Vacuum easel for releasably holding material. The vacuum easel includes a panel having a first sheet and a second sheet with a plurality of walls disposed between the first and second sheets. The walls define a series of progressively larger air pathways between the first and second sheets. A plurality of openings are formed in the first sheet to allow communication of air between the exterior of the first sheet and the respective air pathways. At least a subset of the openings are associated with each of the air pathways. A zone selector is operable to selectively communicate a source of vacuum with at least one of the air pathways to draw air from the exterior of the vacuum easel through the openings associated with the selected air pathway.

摘要翻译： 用于可释放地保持材料的真空画架。 真空画架包括具有第一片材和第二片材的面板，第二片材具有设置在第一片材和第二片材之间的多个壁。 墙壁在第一和第二张片之间限定了一系列逐渐更大的空气通道。 多个开口形成在第一片材中，以允许第一片材的外部和相应的空气通道之间的空气连通。 开口的至少一个子集与每个空气路径相关联。 区域选择器可操作以选择性地将真空源与至少一个空气路径进行通信，以从真空框架的外部抽出空气通过与所选择的空气通道相关联的开口。

公开(公告)号：US5404195A

公开(公告)日：1995-04-04

申请号：US942412

申请日：1992-09-09

申请人： Erich Nagel

发明人： Erich Nagel

IPC分类号： G03B1/48 ,  G03B27/60 ,  G03B27/62 ,  G03B27/64

CPC分类号： G03B27/6285 ,  G03B27/64

摘要： An exposed and developed photographic film is moved through a copying machine between a fixedly mounted lower guide member and an upper guide member which is movable up and down away from and toward the lower guide member. The confronting surfaces of the guide members have raised portions which surround registering windows of the guide members and engage a film all the way around a film frame which is aligned with the windows when the film is brought to a halt. Once the imaging of the frame which is aligned with the windows is completed, several springs lift the upper guide member, and ports in the raised portions of the confronting surfaces discharge jets of compressed air which cause the film to levitate between the two guide members during advancement of the next film frame to a position of alignment with the windows. This reduces the likelihood of scratching of and/or other damage to the film during transport. The ports can receive compressed air without interruption or only while the upper guide member is lifted above and away from the lower guide member.

摘要翻译： 曝光和显影的照相胶片通过复印机移动到固定安装的下引导构件和上引导构件之间，上引导构件可上下移动并朝向下引导构件。 引导构件的相对表面具有围绕引导构件的定位窗口的凸起部分，并且当薄膜停止时将薄膜全部地接合在与窗口对准的胶片框架上。 一旦与窗口对准的框架的成像完成，则几个弹簧提升上引导构件，并且相对表面的凸起部分中的端口排出压缩空气的喷口，这导致薄膜在两个引导构件之间悬浮 将下一个胶片框架推进到与窗口对齐的位置。 这减少了在运输过程中刮伤和/或其他损坏膜的可能性。 这些端口可以不间断地接收压缩空气，或者只有在上引导构件被提升到和远离下引导构件的情况下。

公开(公告)号：US4831419A

公开(公告)日：1989-05-16

申请号：US155349

申请日：1988-02-12

申请人： Thomas C. Iaia, Jr. ,  James A. Herley ,  Roger C. Male ,  William J. McLaughlin ,  Douglas A. McKeown ,  Robert W. Schaffer ,  Robert P. Siegel ,  Charles W. Spehrly, Jr.

发明人： Thomas C. Iaia, Jr. ,  James A. Herley ,  Roger C. Male ,  William J. McLaughlin ,  Douglas A. McKeown ,  Robert W. Schaffer ,  Robert P. Siegel ,  Charles W. Spehrly, Jr.

IPC分类号： G03B27/62 ,  B65H5/02 ,  B65H5/22 ,  G03B27/64 ,  G03G15/00 ,  G03G15/04

CPC分类号： B65H11/005 ,  B65H5/224 ,  G03B27/64 ,  B65H2406/323

摘要： A document handler 20 for presenting documents to the platen 23 of a copier 10 for copying with a vacuum belt platen transport system 32 having document transporting belts 35 movable under a substantially planar vacuum plenum backing and imaging background surface 33a overlying the platen, and a vacuum system 33 for applying a partial vacuum to a document sheet being transported by the movable belts over the platen; with a clamping and unclamping system for moving the vacuum plenum backing and imaging background surface 33a against the platen 23 to flatten the belts 35 and a document thereon against the platen for copying. During unclamping the surface 33a slightly fits away from the platen, while supplying the partial vacuum to lift a document away from the platen retained on the belts, by first lifting a first side of the surface 33a up away from the platen substantially before the opposite side, and then subsequently lifting the opposite side, to generate a controlled air flow for assisting in retaining the documents to the belts, and moving the belts when the surface is lifted away from the platen. During clamping the first side of the surface 33a moves towards the platen beginning slightly before the opposite side to generate a controlled air flow expulsion of air.

公开(公告)号：US4794429A

公开(公告)日：1988-12-27

申请号：US29027

申请日：1987-03-23

申请人： Thomas Acquaviva

发明人： Thomas Acquaviva

IPC分类号： B65H9/04 ,  B65H5/02 ,  B65H5/22 ,  B65H9/16 ,  B65H9/20 ,  B65H20/10 ,  B65H23/032 ,  B65H23/038 ,  B65H83/00 ,  B65H85/00 ,  G03B27/62 ,  G03B27/64 ,  G03G15/00 ,  G03G21/00

CPC分类号： B65H9/20 ,  B65H20/10 ,  B65H23/038 ,  B65H5/224 ,  G03B27/625 ,  G03B27/64 ,  G03G15/60 ,  B65H2406/323 ,  G03G2215/00185 ,  G03G2215/0021 ,  G03G2215/00223 ,  G03G2215/00227

摘要： In an automatic document handling system for a copier, with a system for feeding and registering document sheets, including a platen transport system, wherein the platen transport system includes a document belt system and a vacuum system for retaining documents against the document belt, there is provided common document input and path systems for feeding either conventional document sheets or computer form or other web (CF) documents, the document belt system relatively low friction belt material, the vacuum system automatically maintaining a first vacuum level high enough to retain the conventional document sheets against the document belt system with sufficient force to resist slippage and function as their primary platen transport system, and a vacuum reduction system for automatically reducing the vacuum to a substantially lower level for CF documents which provides for slippage of CF documents relative to the document belt system, and a separate deskewing and driving system for the CF documents in cooperation with the platen transport system, for deskewing the CF web upstream of the platen and pulling through the platen transport system from downstream thereof, to provide a dual mode system in which the platen transport system provides for low frictional relative movement and an imaging background surface for CF documents, but is not their primary transport. There is a system for automatically sensing the acquisition of CF documents and in response automatically reducing the vacuum level and disengaging additional roller drive systems in the path which normally engage conventionally document sheets.

公开(公告)号：US4620787A

公开(公告)日：1986-11-04

申请号：US738345

申请日：1985-05-28

申请人： James A. Black ,  Gregory J. Munson

发明人： James A. Black ,  Gregory J. Munson

IPC分类号： G03B27/20 ,  G03B27/62 ,  G03B27/64

CPC分类号： G03B27/20

摘要： A stencil exposure apparatus that includes a frame with central translucent stencil mounting surface. A plurality of generally flat, resilient, compressible seal elements extend between opposite sides of the translucent surface and are movably mounted on the frame to accommodate the stencil exposure apparatus to a variety of stencil dimensions. A stencil chase mounting bar is movably mounted on the forward face of the frame, is connected to a support bar on the rear face of the frame, and which includes a mechanism for maintaining the orientation of the bar relative to the frame while the mounting bar is being moved. Mounting blocks are slidably mounted on the mounting bar and include a clamping mechanism for rapid lateral adjustment of the blocks.

摘要翻译： 一种模板曝光装置，其包括具有中央半透明模版安装表面的框架。 多个大致平坦的，弹性的可压缩密封元件在半透明表面的相对侧之间延伸并且可移动地安装在框架上以将模板曝光装置适应于各种模板尺寸。 模板追逐安装杆可移动地安装在框架的前表面上，连接到框架后表面上的支撑杆，并且其包括用于保持杆相对于框架的定向的机构，而安装杆 正在移动 安装块可滑动地安装在安装杆上，并且包括用于块的快速侧向调节的夹紧机构。

公开(公告)号：US4588290A

公开(公告)日：1986-05-13

申请号：US713161

申请日：1985-03-18

申请人： Yoshihiro Ohtsuka

发明人： Yoshihiro Ohtsuka

IPC分类号： G03B27/62 ,  G03B27/64

CPC分类号： G03B27/6228

摘要： The present invention relates to an original holding plate hinging mechanism for a copying machine, a printing machine or the like. When a thick solid original, such as a book, needs to be covered with an original holding plate, the pivotal point of the original holding plate is raised so that the original holding plate is placed practically horizontally on the thick solid original when closed. The original holding plate hinging mechanism comprises a supporting member attached rotatably to a member of the copying machine, an original holding plate joined at the rear end thereof to the free end of the supporting member so as to turn relatively to the supporting member, and a resilient means interlocked with both a member of the copying machine and the supporting member to control the torque for turning the supporting member.According to the present invention, the mechanism further includes a control means interlocked with both the supporting member and the original holding plate to control the turning motion of the original holding plate relative to the supporting member.

摘要翻译： 本发明涉及一种用于复印机，印刷机器等的原始保持板铰链机构。 当厚实的原稿（如书）需要用原始的保持板覆盖时，原始保持板的枢转点被升高，使得原始的保持板在关闭时实际上水平放置在厚实的原稿上。 原来的保持板铰接机构包括可旋转地附接到复印机的构件的支撑构件，在其后端处连接到支撑构件的自由端以相对于支撑构件转动的原始保持板， 弹性装置与复印机的构件和支撑构件互锁，以控制用于转动支撑构件的扭矩。 根据本发明，该机构还包括与支撑构件和原始保持板互锁的控制装置，以控制原始保持板相对于支撑构件的转动运动。