公开(公告)号：US06786082B2

公开(公告)日：2004-09-07

申请号：US10145538

申请日：2002-05-13

申请人： Luis Paredes Rojas ,  Alfredo Zolezzi Garreton

发明人： Luis Paredes Rojas ,  Alfredo Zolezzi Garreton

IPC分类号： G01N2918

CPC分类号： G01N29/0609 ,  G01N29/032 ,  G01N29/222 ,  G01N2291/044

摘要： A non-invasive online system for continuous measurements of phase levels in a converter or pyrometallurgical furnace in smelting and conversion processes, consisting in a electrical signal generator, transducers that convert said electrical signals in mechanical waves placed on the outer end of air blowing tuyeres, coupling means between said system and the shell of the converter, transducers placed in the direction of the axis orthogonal to the phases plane for applying mechanical waves that travel in a transversal direction into the converter, a mechanical waves sensor placed around the external wall of the shell of the converter that receives the reflected signal, a crystal local oscillator, means for the preamplification of the signal, an analogous/digital interface, a means for data acquisition, a means for processing the signals so as to determine the power of the reflected signal and the propagation time of the signal between the moment it is emitted by the transducer and the moment in which the reflected signals are received by the sensor, a memory means to store the continuous values of the phase levels and a visualization means for displaying the continuous values of the phase levels.

摘要翻译： 一种用于在熔炼和转化过程中连续测量转炉或火法冶金炉中的相位水平的非侵入式在线系统，包括电信号发生器，转换器，其将放置在吹风风口的外端上的机械波的所述电信号转换， 在所述系统和转换器的外壳之间的耦合装置，换能器放置在与相平面正交的轴的方向上，用于施加沿横向行进的转换器中的机械波;机械波传感器， 接收反射信号的转换器的外壳，晶体本地振荡器，用于信号的前置放大的装置，类似/数字接口，用于数据采集的装置，用于处理信号的装置，以便确定反射的功率 信号和信号在传感器发射的瞬间的传播时间 其中所述反射信号由所述传感器接收;存储装置，用于存储所述相位级的连续值;以及可视化装置，用于显示所述相位级的连续值。

公开(公告)号：US06739195B2

公开(公告)日：2004-05-25

申请号：US10118001

申请日：2002-04-09

申请人： James A. Evans ,  George L. Mason

发明人： James A. Evans ,  George L. Mason

IPC分类号： G01N2918

CPC分类号： G01N29/4427 ,  G01N29/14 ,  G01N29/46 ,  G01N2291/017 ,  G01N2291/018 ,  G01N2291/02872 ,  G01N2291/2696

摘要： A flexible piezoelectric-based transducer, mounted on a circumference of a rotating object senses acoustical energy traversing portions of the object. In a preferred embodiment, the transducer is affixed, using a suitable adhesive, within the enclosed portion of a wheel/tire assembly. The transducer senses acoustical energy, e.g., ultrasonic transmissions, generated by the tire contacting the road surface at its contact patch and, without need of external power, translates it to an electrical current and communicates it for further processing. Because the acoustical impedance of the tire casing changes with temperature, hot spots within the tire, as well as other characteristics of the tire's operation, can be detected. Further, any Doppler shift which occurs due to the rotating medium may be compensated for since the rate of tire rotation may be made known via a speed sensor. A position sensor may also be employed to indicate the position of the hot spot.

摘要翻译： 安装在旋转物体的圆周上的柔性基于压电的换能器感测穿过物体的部分的声能。 在优选实施例中，换能器使用合适的粘合剂固定在轮/轮胎组件的封闭部分内。 换能器感测由轮胎在其接触片处接触路面而产生的声能，例如超声波传输，并且不需要外部功率，将其转换为电流并将其通信用于进一步处理。 由于轮胎壳体的声阻抗随着温度而变化，因此可以检测到轮胎内的热点以及轮胎的其他特性。 此外，可以补偿由于旋转介质而发生的任何多普勒频移，因为可以通过速度传感器知道轮胎旋转速率。 还可以使用位置传感器来指示热点的位置。

公开(公告)号：US06561032B1

公开(公告)日：2003-05-13

申请号：US09570922

申请日：2000-05-15

申请人： Osama Hunaidi

发明人： Osama Hunaidi

IPC分类号： G01N2918

CPC分类号： G01B17/02 ,  G01N29/07 ,  G01N2291/02854 ,  G01N2291/2626 ,  G01N2291/2634

摘要： The average wall thickness of a pipe carrying a fluid is determined by sensing disturbances in the pipe at two spaced locations, determining the propagation velocity of coupled propagation mode signals at low frequencies resulting from the disturbances, and calculating the average pipe wall thickness between the two locations from the propagation velocity and known constants for the pipe and fluid.

摘要翻译： 承载流体的管道的平均壁厚通过在两个间隔的位置处感测管道中的扰动来确定，确定由干扰引起的低频处的耦合传播模式信号的传播速度，并且计算两者之间的平均管壁厚度 来自传播速度和管道和流体的已知常数的位置。

公开(公告)号：US06182510B2

公开(公告)日：2001-02-06

申请号：US09568659

申请日：2000-05-10

申请人： Fred E. Stanke ,  B. T. Khuri-Yakub ,  Hung Pham ,  Talat Hasan

发明人： Fred E. Stanke ,  B. T. Khuri-Yakub ,  Hung Pham ,  Talat Hasan

IPC分类号： G01N2918

CPC分类号： G01N29/46 ,  G01N29/041 ,  G01N29/07 ,  G01N29/449 ,  G01N2291/02854 ,  G01N2291/02881 ,  G01N2291/0423 ,  G01N2291/0427 ,  G01N2291/044 ,  G01N2291/102 ,  G01N2291/2698

摘要： An apparatus and method are disclosed for characterizing semiconductor wafers or other test objects that can support acoustic waves. Source and receiving transducers are configured in various arrangements to respectively excite and detect acoustic waves (e.g., Lamb waves) in a wafer to be characterized. Signals representing the detected waves are digitally processed and used to compute a measurement set correlated with the waves' velocity in the wafer. A characterization sensitivity is provided that describes how different wafer characteristics of interest vary with changes in the propagation of the acoustic waves. Using the characterization sensitivity and measurement sets computed at a setup time when all wafer characteristics are known and one or more process times when at least one of the characteristics is not known the perturbation in wafer characteristics between the setup and the process times can be determined. Characterization accuracy is improved by a wafer calibration procedure wherein measurement offsets from known conditions are determined for each wafer being characterized. An apparatus and technique are disclosed for correcting for anisotropy of acoustic wave velocity due to the direction of wave propagation with respect to a preferred crystallographic axis of the wafer. An apparatus and technique are also described for measuring wafer temperature using a single transducer whose temperature is related to the temperature of the wafer and, optionally, resonator structures. For characterization steps that occur when the wafer is chucked, a chuck structure is described that reduces the likelihood of the chuck interfering with the waves in the wafer.

摘要翻译： 公开了用于表征可支持声波的半导体晶片或其它测试对象的装置和方法。 源和接收换能器被配置成各种布置以分别激发和检测要表征的晶片中的声波（例如，兰姆波）。 表示检测到的波的信号被数字处理并用于计算与晶片中的波速相关的测量集。 提供了表征灵敏度，其描述不同的感兴趣的晶片特性随着声波传播的变化而变化。 使用在所有晶片特性已知的建立时间计算的表征灵敏度和测量集，以及当至少一个特性未知时的一个或多个处理时间，可以确定设置和处理时间之间的晶片特性的扰动。 通过晶片校准程序改进表征精度，其中针对每个被表征的晶片确定对已知条件的测量偏移。 公开了一种用于校正由于相对于晶片的优选结晶轴的波传播方向引起的声波速度的各向异性的装置和技术。 还描述了一种用于使用单个换能器来测量晶片温度的装置和技术，其温度与晶片的温度和可选的谐振器结构相关。 对于在夹持晶片时发生的表征步骤，描述了一种卡盘结构，其减小卡盘干扰晶片中的波的可能性。

公开(公告)号：US06823716B2

公开(公告)日：2004-11-30

申请号：US10406518

申请日：2003-04-03

申请人： Eric Kelner ,  Ali Minachi ,  Thomas E. Owen ,  Marion Burzynski, Jr. ,  Steven P. Petullo

发明人： Eric Kelner ,  Ali Minachi ,  Thomas E. Owen ,  Marion Burzynski, Jr. ,  Steven P. Petullo

IPC分类号： G01N2918

CPC分类号： G01H5/00 ,  G01N29/024 ,  G01N29/222 ,  G01N29/449 ,  G01N2291/02818 ,  G01N2291/02872 ,  G01N2291/02881

摘要： A sensor for measuring the speed of sound in a gas. The sensor has a helical coil, through which the gas flows before entering an inner chamber. Flow through the coil brings the gas into thermal equilibrium with the test chamber body. After the gas enters the chamber, a transducer produces an ultrasonic pulse, which is reflected from each of two faces of a target. The time difference between the two reflected signals is used to determine the speed of sound in the gas.

摘要翻译： 用于测量气体中的声速的传感器。 传感器具有螺旋线圈，气体在进入内腔之前流过该螺旋线圈。 通过线圈的流动使气体与试验箱体热平衡。 在气体进入腔室之后，换能器产生从目标的两个面中的每个面反射的超声波脉冲。 两个反射信号之间的时差用于确定气体中的声速。

公开(公告)号：US06745631B2

公开(公告)日：2004-06-08

申请号：US10435440

申请日：2003-05-09

申请人： Chih-Kun Chen ,  Chung-Min Lin

发明人： Chih-Kun Chen ,  Chung-Min Lin

IPC分类号： G01N2918

CPC分类号： B24B37/26 ,  B24B49/00 ,  B24D13/147 ,  G01N29/07 ,  G01N2291/2638

摘要： A method of measuring pore depth on the surface of a polishing pad during processing. In the present invention, a planar ultrasound sensing device is disposed a predetermined distance above the surface of a polishing pad. The planar ultrasound sensing device sends out a plurality of ultrasound signals to the surface and the pores therein, and receives a plurality of reflected signals from the pad surface and constituent pores. The difference between pore depth and the surface is determined to establish first depth difference data according to the time delay in the reflected signals. The polishing pad is rotated to obtain second to Nth depth difference data. A relational image relative to the surface and the pores of the polishing pad is obtained according to the first to Nth depth difference data.

公开(公告)号：US06640631B1

公开(公告)日：2003-11-04

申请号：US10153565

申请日：2002-05-20

申请人： Kohji Toda

发明人： Kohji Toda

IPC分类号： G01N2918

CPC分类号： G01N29/2468 ,  G01N29/07 ,  G01N29/2462 ,  G01N29/348 ,  G01N29/46 ,  G01N2291/044

摘要： A system for measuring sound velocity in material comprises a piezoelectric substrate, first- and second comb-shaped electrodes, and a counter electrode in contact with a surface-part of a material. When input electric signals Ei having carrier frequencies fi, respectively, are applied between the first comb-shaped electrode and the counter electrode in turn, longitudinal waves are radiated into the material. The longitudinal waves are reflected at the opposite surface-part of the material, and then, detected between the second comb-shaped electrode and the counter electrode as delayed electric signals Di, respectively. The input electric signals Ei and the delayed electric signals Di interfere respectively, so that respective interference signals Ri occur. A sound velocity V in the material is estimated from the interference signals Ri.

摘要翻译： 用于测量材料中的声速的系统包括压电基片，第一和第二梳状电极以及与材料的表面部分接触的对电极。 当分别具有载波频率fi的输入电信号Ei依次施加在第一梳状电极和对电极之间时，纵波被辐射到材料中。 纵波在材料的相对表面部分反射，然后分别作为延迟电信号Di检测在第二梳状电极和对电极之间。 输入电信号Ei和延迟电信号Di分别干扰，从而发生相应的干扰信号Ri。 从干扰信号Ri估计材料中的声速V。

公开(公告)号：US06250160B1

公开(公告)日：2001-06-26

申请号：US09208416

申请日：1998-12-10

申请人： Frank J. Koch ,  Leon C. Vandervalk ,  David J. Beamish

发明人： Frank J. Koch ,  Leon C. Vandervalk ,  David J. Beamish

IPC分类号： G01N2918

CPC分类号： G01B17/025

摘要： A gauge for determining a thickness of a coating on a substrate includes a transducer for emitting ultrasonic signals into the coating and for generating electrical signals proportional to the ultrasonic signals received by said transducer, said received signals include first signals reflected from a transducer/coating interface and second signals reflected from a coating/substrate interface; a pulser for sending pulses to the transducer to trigger the emission of said ultrasonic signals; a sampler for sampling the electrical transducer signals and generating sampled data; a timer for controlling the pulser and the sampler so as to perform an equivalent time sampling of the signals received by the sampler; and a controller for calculating a thickness of the coating based on said sampled data, said controller includes the ability to subject said sampled data to a deconvolution analysis so as to distinguish sampled data corresponding to said first signals from sampled data corresponding to said second signals when the coating is thinner than a wavelength of the ultrasonic signal emitted by the transducer.

摘要翻译： 用于确定衬底上的涂层的厚度的量度包括用于将超声信号发射到涂层中并用于产生与所述换能器接收的超声信号成比例的电信号的换能器，所述接收信号包括从换能器/涂层界面反射的第一信号 和从涂层/衬底界面反射的第二信号; 脉冲发生器，用于向所述换能器发送脉冲以触发所述超声信号的发射; 采样器，用于对电传感器信号进行采样并产生采样数据; 用于控制脉冲发生器和采样器的定时器，以便对由采样器接收的信号执行等效的时间采样; 以及控制器，用于基于所述采样数据计算涂层的厚度，所述控制器包括将所述采样数据进行去卷积分析的能力，以便将对应于所述第一信号的采样数据与对应于所述第二信号的采样数据区分开， 涂层比由换能器发射的超声信号的波长薄。

公开(公告)号：US06240784B1

公开(公告)日：2001-06-05

申请号：US08715221

申请日：1996-09-17

申请人： Masahiro Koike ,  Fuminobu Takahashi ,  Hideki Inoue ,  Yosinori Musha ,  Shuuji Kamimoto ,  Shinji Naito ,  Tsukasa Sasaki

发明人： Masahiro Koike ,  Fuminobu Takahashi ,  Hideki Inoue ,  Yosinori Musha ,  Shuuji Kamimoto ,  Shinji Naito ,  Tsukasa Sasaki

IPC分类号： G01N2918

CPC分类号： G01N29/07 ,  G01N29/30 ,  G01N2291/0258 ,  G01N2291/0421 ,  G01N2291/0422 ,  G01N2291/2675

摘要： A stress evaluation method for evaluating stress acting on a test piece includes the steps of transmitting acoustic waves including a surface wave, a longitudinal wave, and a shear wave through the test piece; receiving the acoustic waves after they have propagated through the test piece; obtaining acoustic velocities of the surface wave at a non-loaded portion and a loaded portion of the test piece based on the received acoustic waves; evaluating a stress in a surface layer of the test piece based on a difference between the surface wave acoustic velocities at the non-loaded portion and the loaded portion and a predetermined relationship between surface wave acoustic velocities and stresses; obtaining an acoustic velocity of the longitudinal wave at the non-loaded portion based on the received acoustic waves; calculating an acoustic velocity of the shear wave at the loaded portion based on the received acoustic waves and the longitudinal wave acoustic velocity at the non-loaded portion; evaluating an internal average stress in the test piece based on the shear wave acoustic velocity at the loaded portion; evaluating an internal stress distribution in the test piece by correcting a hypothetical internal stress distribution in the test piece based on the stress in the surface layer and the internal average stress; and conducting a diagnosis of the test piece based on the internal stress distribution.

摘要翻译： 用于评价作用在试件上的应力的应力评估方法包括以下步骤：通过所述试件发射包括表面波，纵波和剪切波的声波; 在声波传播通过测试片之后接收声波; 基于接收到的声波获得测试片的未加载部分和加载部分的表面波的声速; 基于无负载部分和负载部分之间的表面波声速之间的差异以及表面波声速和应力之间的预定关系来评估试件的表面层中的应力; 基于所接收的声波获得所述未加载部分处的所述纵波的声速; 基于所接收的声波和未加载部分的纵波声速来计算加载部分处的剪切波的声速; 基于加载部分的剪切波声速来评估试件中的内部平均应力; 通过基于表层中的应力和内部平均应力校正试件中的假想内部应力分布来评估试件中的内部应力分布; 并根据内部应力分布对试件进行诊断。

公开(公告)号：US06755082B2

公开(公告)日：2004-06-29

申请号：US10153566

申请日：2002-05-20

申请人： Kohji Toda

发明人： Kohji Toda

IPC分类号： G01N2918

CPC分类号： G01N29/2437 ,  G01N29/022 ,  G01N29/07 ,  G01N29/2468 ,  G01N29/348 ,  G01N2291/0421 ,  G01N2291/045

摘要： A device for measuring sound velocity in material comprises a piezoelectric substrate, first- and second comb-shaped electrodes, a counter electrode, and a reflector. When input electric signals with a frequency f, respectively, are applied between the first comb-shaped electrode and the counter electrode in turn, longitudinal waves are radiated into a material existing between the counter electrode and the reflector, and then, reflected at the reflector, and after all, detected between the second comb-shaped electrode and the counter electrode as delayed electric signals Di in accordance with distances Zi between the counter electrode and the reflector. Electrical coupled-signals from the input electric signals and the delayed electric signals Di interfere respectively, so that respective interference signals Ri occur. A sound velocity V in the material is estimated from the frequency f and the interference signals Ri.

摘要翻译： 用于测量材料中的声速的装置包括压电基片，第一和第二梳状电极，对电极和反射器。 当分别在第一梳状电极和对电极之间施加具有频率f的输入电信号时，纵波被辐射到反电极和反射器之间存在的材料中，然后在反射器处反射 并且毕竟，根据反电极和反射器之间的距离Zi，在第二梳状电极和对电极之间检测为延迟电信号Di。 来自输入电信号和延迟电信号Di的电耦合信号分别干扰，从而发生相应的干扰信号Ri。 从频率f和干扰信号Ri估计材料中的声速V。