公开(公告)号：US06773158B2

公开(公告)日：2004-08-10

申请号：US10203815

申请日：2002-08-14

申请人： Chishio Koshimizu

发明人： Chishio Koshimizu

IPC分类号： G01K700

CPC分类号： G01K7/00 ,  G01K7/32 ,  Y10S414/139

摘要： In a method apparatus for measuring the temperature of a semiconductor substrate during processing thereof in a processing chamber, a resonant circuit formed on the substrate surface is energized by an electromagnetic field radiation device, and disturbances in the electromagnetic field are detected to determine the resonant frequency of the resonant circuit. The temperature of the substrate is determined as a function of the resonant frequency. The substrate is moved into and out of processing chamber by a transfer arm, and the radiation device is disposed on the transfer arm or mounted on the processing chamber. Multiple resonant circuits may be provided, which are energized by movement of the transfer arm, without transferring the substrate.

摘要翻译： 在用于在处理室中处理半导体衬底的温度时测量半导体衬底的温度的方法装置中，形成在衬底表面上的谐振电路由电磁场辐射装置激励，并且检测电磁场中的干扰以确定谐振频率 的谐振电路。 基板的温度作为谐振频率的函数确定。 基板通过传送臂移入和移出处理室，并且辐射装置设置在传送臂上或安装在处理室上。 可以提供多个谐振电路，其通过传输臂的移动而被激励，而不转移衬底。

公开(公告)号：US06655835B2

公开(公告)日：2003-12-02

申请号：US09469841

申请日：1999-12-21

申请人： Carl Vincent Mattoon ,  David James Dolezilek

发明人： Carl Vincent Mattoon ,  David James Dolezilek

IPC分类号： G01K700

CPC分类号： G01K1/026

摘要： The apparatus which is located separately from the RTD includes means for measuring the resistance of a plurality of RTDs present at a selected site, the RTDs being those of a number of different RTD types. The module includes means for storing the resistance/temperature map for each of the plurality of RTDs and for determining the temperatures associated with said resistances from the resistance/temperature maps. The resulting plurality of temperatures for each RTD, respectively, is then transmitted in a known order to a remote protective relay which determines the correct temperature for each RTD connected to the module.

摘要翻译： 与RTD分开设置的装置包括用于测量存在于所选位置的多个RTD的电阻的装置，RTD是多个不同RTD类型的RTD。 模块包括用于存储多个RTD中的每一个的电阻/温度图并且用于从电阻/温度图确定与所述电阻相关联的温度的装置。 然后，分别为每个RTD产生的多个温度以已知的顺序传输到远程保护继电器，该远程保护继电器确定连接到模块的每个RTD的正确温度。

公开(公告)号：US06588931B2

公开(公告)日：2003-07-08

申请号：US09732287

申请日：2000-12-07

申请人： Timothy M. Betzner ,  David P. O'Connell ,  Peter J. Straub ,  Michael J. Boehm

发明人： Timothy M. Betzner ,  David P. O'Connell ,  Peter J. Straub ,  Michael J. Boehm

IPC分类号： G01K700

CPC分类号： G01K7/22

摘要： A temperature sensor incorporating flexible circuit technology. A flexible circuit sensor subassembly is composed of a flexible printed circuit substrate on which is printed a sensor circuit. In a preferred example the flexible circuit sensor subassembly, the sensor circuit has a sensor at a distal end, as for example a surface mount device (SMD) thermistor, a plurality of trace pads at a proximate end, and an interconnecting conductive trace between each trace pad and the sensor. A crimp terminal is respectively crimped onto each trace pad to provide a flexible circuit sensor assembly, wherein the crimp terminals are configured as needed for interfacing with an external circuit. The location of the sensor may be selectively located anywhere on the conductive traces to thereby easily size the probe length of the flexible circuit sensor subassembly to suit a any particular application and fit into any housing. A housing id molded over the flexible circuit sensor assembly. The housing either alone or located in an external shell provides a temperature sensor for a particular purpose. In a variation of the flexible circuit sensor assembly, electronic components can be integrated with the sensor circuit to provide a smart sensor circuit, which may include multiple sensing devices.

公开(公告)号：US06811309B1

公开(公告)日：2004-11-02

申请号：US10088976

申请日：2002-06-27

申请人： Krishnamoorthy Ravishanker

发明人： Krishnamoorthy Ravishanker

IPC分类号： G01K700

CPC分类号： G01K7/01 ,  G05F3/30

摘要： The present invention provides a thermal sensor circuit for sensing the temperature of an integrated circuit chip, the thermal sensor circuit including: an output comparator for comparing a reference voltage, Vref, with a sensed voltage, Vsense, the sensed voltage being measured over a sensing resistor relative to the ground potential of the circuit; a first circuit to which a reference voltage line in connected to measure Vref; a first current mirror providing a first current input to the first circuit and to a compensation circuit; and second current mirror providing a second current input to the compensation circuit and to the sensing resistor. The compensation circuit provides a current gain, defined as the ratio of the second current input to the first current input, for compensating for variations in Vref due to variations of the characteristics of the thermal sensing circuit arising from a manufacturing process of an integrated circuit chip on which the thermal sensor circuit is made by adjusting the second current input in dependence on the variations of the characteristics to thereby vary Vsense along with Vref.

公开(公告)号：US06332710B1

公开(公告)日：2001-12-25

申请号：US09621759

申请日：2000-07-24

申请人： Mehmet Aslan ,  Richard Henderson

发明人： Mehmet Aslan ,  Richard Henderson

IPC分类号： G01K700

CPC分类号： G01K1/026

摘要： A multi-channel remote diode temperature sensor that receives current flow across a plurality of remote diodes on a plurality of channels at a single negative data pin, is small in size and has reduced noise coupling between channels at the common negative data pin. The noise coupling of the multi-channel remote diode temperature sensor is minimized by placing an output of a low impedance buffer in electrical communication with the negative data pin. The voltage produced by the low impedance buffer automatically stabilizes the common mode voltage at the negative data pin. The size is minimized by configuring all channels of the multi-channel remote diode temperature sensor to share the sole negative data pin, thereby reducing pin count.

摘要翻译： 在单个负数据引脚上接收跨多个通道上的多个远程二极管的电流的多通道远端二极管温度传感器的尺寸小，并且在公共负数据引脚上的通道之间具有降低的噪声耦合。 通过将低阻抗缓冲器的输出与负数据引脚进行电气通信，使多通道远端二极管温度传感器的噪声耦合最小化。 由低阻抗缓冲器产生的电压会自动稳定负数据引脚上的共模电压。 通过配置多通道远程二极管温度传感器的所有通道来共享唯一的负数据引脚，从而减小引脚数量，从而最大限度地减小尺寸。

公开(公告)号：US06293699B1

公开(公告)日：2001-09-25

申请号：US09426995

申请日：1999-10-26

申请人： Fred J. Bailey ,  Mark Pinder ,  Carl W. Holz

发明人： Fred J. Bailey ,  Mark Pinder ,  Carl W. Holz

IPC分类号： G01K700

CPC分类号： G01K1/02

摘要： There is disclosed a method for continuously monitoring temperature at multiple locations within a controlled temperature unit (CTU) using RTDs that can be removed and reinserted. The key to the method is the collection of data using an RTD fixed in a phenolic thermowell, which in turn is inserted through a polytetrafluoroethylene-coated sleeve in the wall of the CTU. The temperature information is transmitted from a data module to an interfaced computer system where it may be presented to the operator in a graphical, tabular or text format or stored in memory. The temperature probes are easily removable so as to facilitate calibration without disruption of the contents of the CTU and can be consistently replaced in the same location within the CTU.

摘要翻译： 公开了一种使用可以去除和重新插入的RTD来在受控温度单元（CTU）内的多个位置处连续监测温度的方法。 该方法的关键是使用固定在酚醛热电偶套管中的RTD收集数据，该热电偶套管又通过CTU壁上的聚四氟乙烯涂层套管插入。 温度信息从数据模块传输到接口计算机系统，其中可以以图形，表格或文本格式向操作者呈现或存储在存储器中。 温度探头易于拆卸，以便于校准，而不会中断CTU的内容物，并且可以在CTU内的相同位置一致地进行更换。

公开(公告)号：US06244744B1

公开(公告)日：2001-06-12

申请号：US09314817

申请日：1999-05-19

申请人： James Calvin

发明人： James Calvin

IPC分类号： G01K700

CPC分类号： G01K7/20

摘要： In a three-wire RTD interface, a known current is connected to a first lead during a first measurement interval. In this configuration, current is directed to the first lead and into an RTD. This results in a first signal indicative of a first voltage drop resulting from the voltage drops across the RTD and the lead resistance of the first lead. During a second measurement interval, current is directed through a second lead having a lead resistance substantially identical to the lead resistance of the first lead. This results in a second signal indicative of the voltage drop resulting from the second lead. The first signal, the second signal, and the known current are then combined to eliminate the effect of the lead resistance and to determine the resistance of the RTD.

摘要翻译： 在三线RTD接口中，已知电流在第一测量间隔期间连接到第一引线。 在该配置中，电流被引导到第一引线并进入RTD。 这导致指示由RTD上的电压降和第一引线的引线电阻引起的第一电压降的第一信号。 在第二测量间隔期间，电流被引导通过具有与第一引线的引线电阻基本相同的引线电阻的第二引线。 这导致指示由第二引线产生的电压降的第二信号。 然后组合第一信号，第二信号和已知电流以消除引线电阻的影响并确定RTD的电阻。

公开(公告)号：US06746150B2

公开(公告)日：2004-06-08

申请号：US09896354

申请日：2001-06-29

申请人： Karl-Heinz Wienand ,  Matthias Muziol

发明人： Karl-Heinz Wienand ,  Matthias Muziol

IPC分类号： G01K700

CPC分类号： G01K13/02

摘要： For detecting the temperature of a fluid, particularly a flowing liquid or gaseous medium, in the hollow space of a housing, a temperature-measuring element is provided that can be connected to an evaluation device via a plug arrangement and is arranged in a protective tube of a sensor housing, which is closed on one side, and with a connection piece firmly affixed thereto. The protective tube projects at least with its tip into an opening of the hollow space that is sealed off from the outside atmosphere using an elastic O-ring. The temperature-measuring element is arranged in the region of the tip of the protective tube on one end of a longitudinally extending circuit board and is connected via strip conductors to the plug arrangement that leads to the outside. The plug arrangement is surrounded by a screw sheath of the sensor housing, which is firmly connected to the protective tube and is provided with a threading that projects into the housing of the hollow space for the purpose of mounting.

摘要翻译： 为了检测在壳体的中空空间中的流体，特别是流动的液体或气体介质的温度，提供了可以通过插头装置连接到评估装置并设置在保护管中的温度测量元件 传感器壳体在一侧封闭，并且连接件牢固地固定在其上。 保护管至少使其尖端突出到使用弹性O形环与外部大气密封的中空空间的开口中。 温度测量元件设置在纵向延伸的电路板的一端上的保护管的尖端的区域中，并且经由带状导体连接到通向外部的插头装置。 插头布置被传感器外壳的螺纹护套包围，传感器壳体的螺纹护套牢固地连接到保护管并且设置有用于安装目的的突出到中空空间的壳体中的螺纹。

公开(公告)号：US06712506B2

公开(公告)日：2004-03-30

申请号：US10148811

申请日：2002-06-05

申请人： Philippe Pantigny

发明人： Philippe Pantigny

IPC分类号： G01K700

CPC分类号： H04N5/3745 ,  H04N5/3559 ,  H04N5/378

摘要： The invention relates to a reader for an electromagnetic radiation detection element comprising: at least one integration capacitor (16) to integrate electrical charges output by the said detection element, an amplifier (18) with a high impedance terminal (20) connected to the integration capacitor (16) and a low impedance terminal connected to an output stage (22), and means (24, 27) of isolating the integration capacitor (16) from the detection element when the capacitor voltage exceeds a set value. According to the invention, the comparator means are connected to the low impedance terminal (50) of the amplifier (18). Application to sensors in matrices.

摘要翻译： 本发明涉及一种用于电磁辐射检测元件的读取器，包括：至少一个积分电容器（16），以集成由所述检测元件输出的电荷;放大器（18），其具有连接到所述集成的高阻抗端子（20） 电容器（16）和连接到输出级（22）的低阻抗端子，以及当电容器电压超过设定值时将积分电容器（16）与检测元件隔离的装置（24,27）。根据本发明， 比较器装置连接到放大器（18）的低阻抗端子（50）。应用于矩阵中的传感器。

公开(公告)号：US06467954B2

公开(公告)日：2002-10-22

申请号：US09733073

申请日：2000-12-11

申请人： Takayoshi Honda ,  Yoshio Onuma

发明人： Takayoshi Honda ,  Yoshio Onuma

IPC分类号： G01K700

CPC分类号： G01N27/4067

摘要： The resistance of an air-fuel-ratio sensor element is determined from current detected before changing an applied voltage to the sensor and current detected when a predetermined period elapses after changing the applied voltage to the sensor. A resistence detector includes operational amplifiers, resistors and transistors. The applied voltage is changed by switching the transistors to more accurately detect a resistance value.

摘要翻译： 空气燃料比传感器元件的电阻由改变施加到传感器的电压之前检测到的电流确定，并且在将施加的电压改变为传感器之后经过预定时间后检测到的电流。 电阻检测器包括运算放大器，电阻和晶体管。 施加的电压通过切换晶体管来更精确地检测电阻值而改变。