公开(公告)号：US06018616A

公开(公告)日：2000-01-25

申请号：US28177

申请日：1998-02-23

Applicant: Charles D. Schaper

Inventor： Charles D. Schaper

IPC: H01L21/00 ,  C23C16/00 ,  F27B5/14 ,  F29B29/00

CPC classification number: H01L21/67115

Abstract: In general, the present invention provides a single thermal cycling module for baking and chilling a substrate, such as a wafer, that is in thermal contact with a foil heater, a heat exchanger, and a radiation heater. The radiation heater thermally heats a fluid contained by the heat exchanger, which in turn, thermally bakes the substrate at a desired temperature. When the radiation heater is deactivated, a fluid circulates through the heat exchanger to chill the substrate. The foil heater assists the baking and chilling phases by elevating the temperature of the substrate when necessary to prevent or regulate temperature fluctuations of the substrate temperature. Both the radiation heater and the foil heater can provide several zones for varying the heat applied across the substrate, and a single fluid temperature is provided to the heat exchanger for both baking and chilling cycles.

Abstract translation: 通常，本发明提供了用于烘烤和冷却与箔加热器，热交换器和辐射加热器热接触的基底（例如晶片）的单个热循环模块。 辐射加热器热加热由热交换器包含的流体，而热交换器又将基底热烘烤到期望的温度。 当辐射加热器停用时，流体循环通过热交换器以冷却基板。 箔加热器在必要时通过升高基板的温度来帮助烘烤和冷却相，以防止或调节基板温度的温度波动。 辐射加热器和箔加热器都可以提供几个区域来改变施加在基板上的热量，并且单独的流体温度被提供给用于烘烤和冷却循环的热交换器。

公开(公告)号：US07900694B2

公开(公告)日：2011-03-08

申请号：US11569424

申请日：2005-05-23

Applicant: Yong-Jun Jee ,  Jae-Ho Kim ,  Bok-Sun Kang

Inventor： Yong-Jun Jee ,  Jae-Ho Kim ,  Bok-Sun Kang

IPC: B60H1/00 ,  F29B29/00 ,  B01D53/30 ,  B01D39/00 ,  B01D46/00

CPC classification number: B60H3/0608 ,  B60H3/0625 ,  B60H2003/065 ,  B60H2003/0683 ,  B60H2003/0691

Abstract: An air conditioner for a vehicle includes an air conditioner case having an evaporator and a heater core installed therein and having a blower installed at an inlet thereof; a movable filter moving between an air-filtering location and an air-non-filtering location of the air conditioner case; a judging device judging whether air blown by the blower inside the air conditioner case is contaminated; and a driving device moving the movable filter to the air-filtering location when the judging device determines that the air is contaminated and to the air-non-filtering location when the judging device determines that the air is not contaminated. Therefore, when it is determined that the air is contaminated, the movable filter is moved to the air-filtering location. When it is determined that the air is not contaminated, the movable filter is moved to the air-non-filtering location.

Abstract translation: 一种用于车辆的空调器包括：具有安装在其中的蒸发器和加热器芯片的空调机壳体，并具有安装在其入口处的鼓风机; 移动过滤器，其在所述空调机壳体的空气过滤位置与空气不过滤位置之间移动; 判断装置判断由空调机内的鼓风机吹出的空气是否被污染; 以及驱动装置，当所述判断装置判断为空气不被污染时，当所述判断装置判定为空气被污染时，将所述可动过滤器移动到所述空气过滤部。 因此，当确定空气被污染时，可移动过滤器被移动到空气过滤位置。 当确定空气不被污染时，可移动过滤器被移动到无空气过滤位置。

公开(公告)号：US6102114A

公开(公告)日：2000-08-15

申请号：US161719

申请日：1998-09-29

Applicant: Yoshikazu Nishihara ,  Kuniyasu Uchiyama ,  Masanori Ogawa ,  Youji Takanashi ,  Takahiko Ao ,  Norimasa Ishikawa

Inventor： Yoshikazu Nishihara ,  Kuniyasu Uchiyama ,  Masanori Ogawa ,  Youji Takanashi ,  Takahiko Ao ,  Norimasa Ishikawa

IPC: F24F3/06 ,  F24F11/00 ,  F25B13/00 ,  F25B49/02 ,  F29B29/00 ,  F24F11/02

CPC classification number: F24F11/008 ,  F24F3/065 ,  F25B49/025 ,  F25B13/00 ,  F25B2313/008 ,  F25B2600/021 ,  Y02B30/741

Abstract: A multi-room air conditioning system includes an outdoor unit and a plurality of indoor units connected in parallel to the outdoor unit. A compressor frequency and combustion control calculator reads a load level for each indoor unit from a load coefficient table using a differential temperature calculated by a differential temperature calculator and a rated capacity stored in a rated capacity memory. The compressor frequency and combustion control calculator then multiplies a sum of the load levels by a predetermined constant and adds a compensation value thereto to obtain a frequency value. This value is used to control the compressor. The compressor frequency and combustion control calculator also sets a target combustion level using the frequency value for control of a refrigerant heater mounted in the outdoor unit.

Abstract translation: 多房间空调系统包括室外单元和与室外单元并联连接的多个室内单元。 压缩机频率和燃烧控制计算器使用由差分温度计算器计算的差分温度和存储在额定容量存储器中的额定容量从负载系数表读取每个室内单元的负载水平。 然后，压缩机频率和燃烧控制计算器将负载电平之和乘以预定常数，并将补偿值加到其上以获得频率值。 该值用于控制压缩机。 压缩机频率和燃烧控制计算器还使用安装在室外机中的制冷剂加热器的控制频率值来设定目标燃烧水平。

公开(公告)号：US07225864B2

公开(公告)日：2007-06-05

申请号：US09828029

申请日：2001-04-06

Applicant: In Kwon Jeong

Inventor： In Kwon Jeong

IPC: F29B29/00

CPC classification number: H01L21/67248 ,  F25B25/005 ,  F25D17/02 ,  F25D31/005

Abstract: A temperature control system for a semiconductor processing facility includes a common cooling unit for controlling the temperature of a cooling fluid and multiple remote temperature control modules that separately control temperatures of multiple process components. The temperature control modules are near process components and include a circulation loop for cooling fluid from the common cooling unit and a circulation loop for a heat transfer fluid received from a component. A heat exchanger within the temperature control module allows heat transfer between heat transfer fluid and cooling fluid, thereby cooling the component. A heat source may also be within the temperature control module to heat the heat transfer fluid and the component. The cooling unit may be a refrigeration unit that provides compressed refrigerant to the temperature control modules which may include an upstream thermal expansion valve and a downstream refrigerant flow control valve that form an evaporation chamber.

Abstract translation: 用于半导体处理设备的温度控制系统包括用于控制冷却流体的温度的公共冷却单元和分别控制多个处理组件的温度的多个远程温度控制模块。 温度控制模块靠近工艺组件，并且包括用于冷却来自公共冷却单元的流体的循环回路和用于从部件接收的传热流体的循环回路。 温度控制模块内的热交换器允许传热流体和冷却流体之间的热传递，从而冷却部件。 热源也可以在温度控制模块内，以加热传热流体和组件。 冷却单元可以是向温度控制模块提供压缩的制冷剂的制冷单元，其可以包括形成蒸发室的上游热膨胀阀和下游制冷剂流量控制阀。

公开(公告)号：US07119306B2

公开(公告)日：2006-10-10

申请号：US10752374

申请日：2004-01-06

Applicant: Walter J. Boryca ,  Jackson M. Miles, Jr. ,  Thomas Rands

Inventor： Walter J. Boryca ,  Jackson M. Miles, Jr. ,  Thomas Rands

IPC: F29B29/00

CPC classification number: A23L3/365 ,  A23L3/36

Abstract: In one aspect, a food thawing cabinet includes at least one thawing chamber and one or more wall blowers and a heater for producing a controlled high volume of air flow over food product, with the heater controlled in a cyclic manner. In another aspect, various advanced control techniques for controlling heat input are provided in an effort to lower the time required to thaw frozen food products in a safe manner.

Abstract translation: 在一个方面，一种食物解冻柜包括至少一个解冻室和一个或多个壁鼓风机和加热器，用于在加热器以循环方式控制的情况下，在食品上产生受控的大量空气流量。 在另一方面，提供了用于控制热输入的各种先进控制技术，以便以安全的方式降低冷冻食品解冻所需的时间。