Anti-reflective coating compositions comprising polymerized aminoplasts

    公开(公告)号:US06512084B2

    公开(公告)日:2003-01-28

    申请号:US10122069

    申请日:2002-04-12

    Abstract: Improved anti-reflective coating compositions for use in integrated circuit manufacturing processes and methods of forming these compositions are provided. Broadly, the compositions are formed by heating a solution comprising a compound including specific compounds (e.g., alkoxy alkyl melamines, alkoxy alkyl benzoguanamines) under acidic conditions so as to polymerize the compounds and form polymers having an average molecular weight of at least about 1,000 Daltons. The monomers of the resulting polymers are joined to one another via linkage groups (e.g., —CH2—, —CH2—O—CH2—) which are bonded to nitrogen atoms on the respective monomers. The polymerized compound is mixed with a solvent and applied to a substrate surface after which it is baked to form an anti-reflective layer. The resulting layer has high k values, improved etch rates, and can be formulated for both conformal and planar applications.

    Curable compositions containing benzoxazine
    4.
    发明授权
    Curable compositions containing benzoxazine 有权
    含有苯并恶嗪的固化组合物

    公开(公告)号:US06620905B1

    公开(公告)日:2003-09-16

    申请号:US10080738

    申请日:2002-02-23

    Applicant: Osama M. Musa

    Inventor: Osama M. Musa

    CPC classification number: C07D265/16 C08G73/06

    Abstract: Curable compositions comprise a benzoxazine compound or resin in combination with at least one additional curable compound or resin. Optionally, the composition will further comprise a curing agent and/or a filler. These compositions have utility as adhesives, coatings and encapsulants, especially for use within the semiconductor fabrication industry, with particular utility as die attach adhesives, films, and underfill materials, such as no-flow underfills, capillary flow underfills, wafer level underfills, and as lead free solders.

    Abstract translation: 可固化组合物包含与至少一种另外的可固化化合物或树脂组合的苯并恶嗪化合物或树脂。 任选地,组合物还将包含固化剂和/或填料。 这些组合物具有作为粘合剂,涂料和密封剂的用途,特别是在半导体制造工业中使用,特别用作管芯附着粘合剂,薄膜和底部填充材料,例如无流动底部填充物,毛细管流动底部填充物,晶片级底层填充物和 作为无铅焊料。

    Anti-reflective coating compositions comprising polymerized aminoplasts
    6.
    发明授权
    Anti-reflective coating compositions comprising polymerized aminoplasts 有权
    包含聚合的氨基塑料的抗反射涂料组合物

    公开(公告)号:US06323310B1

    公开(公告)日:2001-11-27

    申请号:US09552236

    申请日:2000-04-19

    Abstract: Improved anti-reflective coating compositions for use in integrated circuit manufacturing processes and methods of forming these compositions are provided. Broadly, the compositions are formed by heating a solution comprising a compound including specific compounds (e.g., alkoxy alkyl melamines, alkoxy alkyl benzoguanamines) under acidic conditions so as to polymerize the compounds and form polymers having an average molecular weight of at least about 1,000 Daltons. The monomers of the resulting polymers are joined to one another via linkage groups (e.g., —CH2—, —CH2—O—CH2—) which are bonded to nitrogen atoms on the respective monomers. The polymerized compound is mixed with a solvent and applied to a substrate surface after which it is baked to form an anti-reflective layer. The resulting layer has high k values and can be formulated for both conformal and planar applications.

    Abstract translation: 提供用于集成电路制造工艺的改进的抗反射涂料组合物和形成这些组合物的方法。 广泛地,通过在酸性条件下加热包含特定化合物(例如,烷氧基烷基三聚氰胺,烷氧基烷基苯胍胺)的化合物的溶液来形成组合物,以便使化合物聚合并形成平均分子量为至少约1,000道尔顿的聚合物 。 所得聚合物的单体通过与各单体上的氮原子键合的连接基团(例如,-CH 2 - , - CH 2 -O-CH 2 - )彼此连接。 将聚合的化合物与溶剂混合并施加到基材表面,然后将其烘焙以形成抗反射层。 所得到的层具有高k值,并且可以适用于共形和平面应用。

    Conducting polymer transition metal hybrid materials and sensors
    7.
    发明授权
    Conducting polymer transition metal hybrid materials and sensors 失效
    传导聚合物过渡金属杂化材料和传感器

    公开(公告)号:US06323309B1

    公开(公告)日:2001-11-27

    申请号:US09201743

    申请日:1998-12-01

    CPC classification number: C08G79/00 C08G73/06 C08G73/0688 C08L101/12

    Abstract: Conductive properties are optimized in conducting polymers, made up of organic units and metal ions, by tailoring the position of metal ions with respect to conductive pathways or by selecting components such that the redox potential of organic units and metal ions differs by no more than 250 mV. Very small devices, and articles in which a high percentage of metal ions are redox active, are provided. Articles that can serve as sensors include metal ions with at least one free reactive site that can accommodate an analyte for conductivity change detection. Chemoresistive devices, field effect transistors, and signal amplifiers are provided.

    Abstract translation: 导电性能通过由有机单元和金属离子组成的导电聚合物进行优化,通过调整金属离子相对于导电通路的位置或通过选择组分使得有机单元和金属离子的氧化还原电位不超过250 mV。 提供非常小的器件和其中高百分比的金属离子具有氧化还原活性的物品。 可用作传感器的物品包括具有至少一个自由反应位点的金属离子,其可以容纳用于电导率变化检测的分析物。 提供了化学电阻器件,场效应晶体管和信号放大器。

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