Abstract:
Improved anti-reflective coating compositions for use in integrated circuit manufacturing processes and methods of forming these compositions are provided. Broadly, the compositions are formed by heating a solution comprising a compound including specific compounds (e.g., alkoxy alkyl melamines, alkoxy alkyl benzoguanamines) under acidic conditions so as to polymerize the compounds and form polymers having an average molecular weight of at least about 1,000 Daltons. The monomers of the resulting polymers are joined to one another via linkage groups (e.g., —CH2—, —CH2—O—CH2—) which are bonded to nitrogen atoms on the respective monomers. The polymerized compound is mixed with a solvent and applied to a substrate surface after which it is baked to form an anti-reflective layer. The resulting layer has high k values, improved etch rates, and can be formulated for both conformal and planar applications.
Abstract:
Multicrystalline melamine powder having a specific area of from 0.7-5 m2/g, content of oxygen-containing components of less than 0.7 wt %, an APHA colour less than 17 and a melam content higher than 1.5 wt %. The multicrystalline melamine powder may be used in amino-formaldehyde resins.
Abstract:
Curable compositions comprise a benzoxazine compound or resin in combination with at least one additional curable compound or resin. Optionally, the composition will further comprise a curing agent and/or a filler. These compositions have utility as adhesives, coatings and encapsulants, especially for use within the semiconductor fabrication industry, with particular utility as die attach adhesives, films, and underfill materials, such as no-flow underfills, capillary flow underfills, wafer level underfills, and as lead free solders.
Abstract:
Improved anti-reflective coating compositions for use in integrated circuit manufacturing processes and methods of forming these compositions are provided. Broadly, the compositions are formed by heating a solution comprising a compound including specific compounds (e.g., alkoxy alkyl melamines, alkoxy alkyl benzoguanamines) under acidic conditions so as to polymerize the compounds and form polymers having an average molecular weight of at least about 1,000 Daltons. The monomers of the resulting polymers are joined to one another via linkage groups (e.g., —CH2—, —CH2—O—CH2—) which are bonded to nitrogen atoms on the respective monomers. The polymerized compound is mixed with a solvent and applied to a substrate surface after which it is baked to form an anti-reflective layer. The resulting layer has high k values and can be formulated for both conformal and planar applications.
Abstract:
Conductive properties are optimized in conducting polymers, made up of organic units and metal ions, by tailoring the position of metal ions with respect to conductive pathways or by selecting components such that the redox potential of organic units and metal ions differs by no more than 250 mV. Very small devices, and articles in which a high percentage of metal ions are redox active, are provided. Articles that can serve as sensors include metal ions with at least one free reactive site that can accommodate an analyte for conductivity change detection. Chemoresistive devices, field effect transistors, and signal amplifiers are provided.